Olicom 9600 manual Single Cryo-Torr Cryopump Connections, Single Cryo-Torr Cryopump Installation

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Installation

CTI-CRYOGENICS

HELIX TECHNOLOGY CORPORATION

Single Cryo-Torr Cryopump Connections

CAUTION

Make sure the Compressor power is OFF before making any connections to the rear panel.

1.Connect the Supply and Return lines to the 9600 Compressor as described in Connecting/Disconnecting Helium Flex Lines within this section.

2.Connect one end of the Cryopump cold head cable to the CRYOPUMP ELECTRICAL OUTLET on the rear panel of the Compressor as shown in Figure 3-5. Connect the opposite end of the cold head cable to the cryopump cold head cable connector as shown in Figure 3-5.

HELIUM SUPPLY

HELIUM RETURN

REMOTE

CRYO-TORR

POWER CABLE

WATERPOWER

Figure 3-5: Single Cryo-Torr Cryopump Installation

3-10	P/N 8040540

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Contents 8040540 Rev 12/2004 Compressor Installation, Operation, Maintenance InstructionsHelix Page Table of Contents Installation MaintenanceOperation Figures Tables 9600 Compressor Description Compressor ConfigurationsGeneral BenefitsCTI-CRYOGENICS Helium Refrigeration System System Documentation9600 Compressor Dimensions SpecificationsCompressor Weight WeightElectrical Input Specifications ElectricalCooling Water Cooling Water SpecificationsGeneral General Compressor Operating Specifications9600 Compressor Rear View Component Locations Component DescriptionPower Inlet Power on IndicatorSystem Circuit Breaker Control Circuit BreakerCooling Water OUT Return Gas CouplingCryopump Electrical Outlet Cryopump Electrical Outlet Pin AssignmentsCompressor Remote Connector Cryopump Power Phase SwitchCompressor Remote Connector Pin Assignments Multiple On-Board Cryopump Connections9600 Compressor Connected to Multiple On-Board Cryopumps 9600 Compressor Connected to Multiple Cryo-Torr Cryopumps Multiple Cryo-Torr Cryopump ConnectionsCTI-CRYOGENICS Introduction Unpacking and InspectionShipping Carton Inspection Removal from Shipping CartonCompressor Inspection Shipping Carton ContentsCompressor Helium Static Pressure VerificationInstallation END Supply and Return Water Line Connections Hard Water LinesFlexible Water Lines Electrical Connections Power Cable Preparation9600 Compressor Circuit Breaker Terminals Cover Removed Proceed with Cryopump Power Phase Switch Setting Phase CheckConnecting/Disconnecting Helium Flex Lines Cryopump Power Phase Switch SettingConnecting Disconnecting Single On-Board Cryopump Connections Single On-Board Cryopump ConnectionsSingle Cryo-Torr Cryopump Connections Single Cryo-Torr Cryopump InstallationHelium Line Connections Power Cable Connections Multiple Cryo-Torr Cryopump Connections CTI-CRYOGENICS Recommended Multiple Cryo-Torr Cryopump Installation Alternative Multiple Cryo-Torr Cryopump Installation Operation Adjusting System Helium PressureStatic Helium System Pressure Verification 9600 Compressor Helium Static ChargeCompressor Operation Replacement of Helium Circuit Components CTI-CRYOGENICS Maintenance Scheduled MaintenanceSuggested Maintenance Equipment Disconnecting Self Sealing Couplings Adsorber ReplacementDate 9600 Compressor Helium Pressure Control Components Reducing Helium PressureAdding Helium Increasing Helium PressureCTI-CRYOGENICS Appendix a Customer Support Information MailProduct Information Page Figure B-19600 Compressor Flow Diagram Appendix B Flow DiagramAppendix B Flow Diagram Appendix C Troubleshooting Procedures Troubleshooting the CompressorTechnical Inquiries Compressor Remote Table C-1 Compressor Troubleshooting ProceduresAppendix a to contact CTI-CRYOGENICS Appendix D Schematic Figure D-19600 Motor Drive Compressor Schematic