Olicom 9600 manual Multiple Cryo-Torr Cryopump Connections

9600 Compressor Installation, Operation, and Maintenance

CTI-CRYOGENICS

HELIX TECHNOLOGY CORPORATION

HELIUM SUPPLY
HELIUM RETURN
	ON-BOARD
REMOTE	SPLITTER
	BOX

ON-BOARD POWER CABLES

WATER POWER

Figure 3-7: Alternative Multiple On-Board Cryopump or Waterpump Installation

(Splitter Box located at Compressor)

Multiple Cryo-Torr Cryopump Connections

CAUTION

Make sure the Compressor power is OFF before making any connections to the rear panel.

Helium Line Connections

CAUTION

The use of several compressors on a single manifold feeding a common supply header and a common return header requires special precautions. Contact CTI-CRYOGENICS for a review of the intended installation and for specific technical instructions.

The use of a 9600 compressor on a manifold with other CTI-CRYOGENICS compressor models requires a reduction of the helium charge pressure to 200 - 210 psig charge pressure to avoid helium safety valves from inadvertently venting. Refer to Section 4 - Operation and Section 5 - Maintenance for more information.

P/N 8040540 3-13