Olicom
9600
manual
Cti-Cryogenics
Troubleshooting
Specification
Install
Appendix B Flow Diagram
Power on Indicator
Connecting
Maintenance
Compressor Configurations
Compressor Remote Connector
Phase Check
Page 57
Appendix C - Troubleshooting Procedures
CTI
-CRYOGENICS
HELIX TECHNOLOGY CORPORATION
C-4
P/N 8040540
Page 56
Page 58
Image 57
Page 56
Page 58
Contents
8040540 Rev 12/2004
Compressor Installation, Operation, Maintenance Instructions
Helix
Page
Table of Contents
Installation
Maintenance
Operation
Figures
Tables
9600 Compressor Description
Compressor Configurations
General
Benefits
CTI-CRYOGENICS Helium Refrigeration System
System Documentation
9600 Compressor
Dimensions
Specifications
Compressor Weight
Weight
Electrical Input Specifications
Electrical
Cooling Water
Cooling Water Specifications
General
General Compressor Operating Specifications
9600 Compressor Rear View Component Locations
Component Description
Power Inlet
Power on Indicator
System Circuit Breaker
Control Circuit Breaker
Cooling Water OUT
Return Gas Coupling
Cryopump Electrical Outlet
Cryopump Electrical Outlet Pin Assignments
Compressor Remote Connector
Cryopump Power Phase Switch
Compressor Remote Connector Pin Assignments
Multiple On-Board Cryopump Connections
9600 Compressor Connected to Multiple On-Board Cryopumps
9600 Compressor Connected to Multiple Cryo-Torr Cryopumps
Multiple Cryo-Torr Cryopump Connections
CTI-CRYOGENICS
Introduction
Unpacking and Inspection
Shipping Carton Inspection
Removal from Shipping Carton
Compressor Inspection
Shipping Carton Contents
Compressor
Helium Static Pressure Verification
Installation
END
Supply and Return Water Line Connections
Hard Water Lines
Flexible Water Lines
Electrical Connections
Power Cable Preparation
9600 Compressor Circuit Breaker Terminals Cover Removed
Proceed with Cryopump Power Phase Switch Setting
Phase Check
Connecting/Disconnecting Helium Flex Lines
Cryopump Power Phase Switch Setting
Connecting
Disconnecting
Single On-Board Cryopump Connections
Single On-Board Cryopump Connections
Single Cryo-Torr Cryopump Connections
Single Cryo-Torr Cryopump Installation
Helium Line Connections
Power Cable Connections
Multiple Cryo-Torr Cryopump Connections
CTI-CRYOGENICS
Recommended Multiple Cryo-Torr Cryopump Installation
Alternative Multiple Cryo-Torr Cryopump Installation
Operation
Adjusting System Helium Pressure
Static Helium System Pressure Verification
9600 Compressor Helium Static Charge
Compressor Operation
Replacement of Helium Circuit Components
CTI-CRYOGENICS
Maintenance
Scheduled Maintenance
Suggested Maintenance Equipment
Disconnecting Self Sealing Couplings
Adsorber Replacement
Date
9600 Compressor Helium Pressure Control Components
Reducing Helium Pressure
Adding Helium
Increasing Helium Pressure
CTI-CRYOGENICS
Appendix a Customer Support Information
Mail
Product Information
Page
Figure B-19600 Compressor Flow Diagram
Appendix B Flow Diagram
Appendix B Flow Diagram
Appendix C Troubleshooting Procedures
Troubleshooting the Compressor
Technical Inquiries
Compressor Remote
Table C-1 Compressor Troubleshooting Procedures
Appendix a to contact
CTI-CRYOGENICS
Appendix D Schematic
Figure D-19600 Motor Drive Compressor Schematic
Related pages
¿Qué es el
significado de los símbolos en el monitor UA-1020
?
Top
Page
Image
Contents