Olicom 9600 manual End

Page 25

Installation

START

Supply and Return Water Line Connections

(refer to page 3-3)

Electrical Connections

(refer to page 3-4)

Phase Check

(refer to page 3-6)

2Ø or 3Ø Cryopump Power?

(refer to page 3-7)

Connect/Disconnect Helium Flexlines

(refer to page 3-7)

Single or Multiple

Cryopump

Installation?

CTI-CRYOGENICS

HELIX TECHNOLOGY CORPORATION

Single Cryopump Connections

(refer to page 3-9)

Multiple Cryopump Connections

(refer to page 3-11)

Refer to

Section 4 - Operation

END

Figure 3-1: 9600 Compressor Installation Flowchart

3-2	P/N 8040540

Image 25

Contents 8040540 Rev 12/2004 Compressor Installation, Operation, Maintenance InstructionsHelix Page Table of Contents Maintenance InstallationOperation Figures Tables 9600 Compressor Description Compressor ConfigurationsGeneral BenefitsCTI-CRYOGENICS Helium Refrigeration System System Documentation9600 Compressor Dimensions SpecificationsCompressor Weight WeightElectrical Input Specifications ElectricalCooling Water Cooling Water SpecificationsGeneral General Compressor Operating Specifications9600 Compressor Rear View Component Locations Component DescriptionPower Inlet Power on IndicatorSystem Circuit Breaker Control Circuit BreakerCooling Water OUT Return Gas CouplingCryopump Electrical Outlet Cryopump Electrical Outlet Pin AssignmentsCompressor Remote Connector Cryopump Power Phase SwitchCompressor Remote Connector Pin Assignments Multiple On-Board Cryopump Connections9600 Compressor Connected to Multiple On-Board Cryopumps 9600 Compressor Connected to Multiple Cryo-Torr Cryopumps Multiple Cryo-Torr Cryopump ConnectionsCTI-CRYOGENICS Introduction Unpacking and Inspection Shipping Carton Inspection Removal from Shipping CartonCompressor Inspection Shipping Carton ContentsCompressor Helium Static Pressure VerificationInstallation END Hard Water Lines Supply and Return Water Line ConnectionsFlexible Water Lines Electrical Connections Power Cable Preparation9600 Compressor Circuit Breaker Terminals Cover Removed Proceed with Cryopump Power Phase Switch Setting Phase CheckCryopump Power Phase Switch Setting Connecting/Disconnecting Helium Flex LinesConnecting Disconnecting Single On-Board Cryopump Connections Single On-Board Cryopump ConnectionsSingle Cryo-Torr Cryopump Connections Single Cryo-Torr Cryopump InstallationHelium Line Connections Power Cable Connections Multiple Cryo-Torr Cryopump Connections CTI-CRYOGENICS Recommended Multiple Cryo-Torr Cryopump Installation Alternative Multiple Cryo-Torr Cryopump Installation Operation Adjusting System Helium PressureStatic Helium System Pressure Verification 9600 Compressor Helium Static ChargeCompressor Operation Replacement of Helium Circuit Components CTI-CRYOGENICS Scheduled Maintenance MaintenanceSuggested Maintenance Equipment Disconnecting Self Sealing Couplings Adsorber ReplacementDate 9600 Compressor Helium Pressure Control Components Reducing Helium PressureAdding Helium Increasing Helium PressureCTI-CRYOGENICS Mail Appendix a Customer Support InformationProduct Information Page Figure B-19600 Compressor Flow Diagram Appendix B Flow DiagramAppendix B Flow Diagram Troubleshooting the Compressor Appendix C Troubleshooting ProceduresTechnical Inquiries Compressor Remote Table C-1 Compressor Troubleshooting ProceduresAppendix a to contact CTI-CRYOGENICS Appendix D Schematic Figure D-19600 Motor Drive Compressor Schematic