Olicom 9600 manual Tables

9600 Compressor Installation, Operation, and Maintenance

Table of Contents (continued)

Figure 5-1: Disconnecting Self Sealing Couplings	5-2
Figure 5-2: Adsorber Location within the 9600 Compressor
(Rear Panel Removed)	5-3
Figure 5-3: 9600 Compressor Helium Pressure Control Components	5-4

Figure B-1: 9600 Compressor Flow Diagram . . . . . . . . . . . . . . . . . . . . . . . . . . B-1

Figure D-1:9600 Motor Drive Compressor Schematic . . . . . . . . . . . . . . . . . . . D-2

Tables

Table 1-1: Compressor Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

Table 1-2: Electrical Input Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

Table 1-3: Cooling Water Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

Table 1-4: General Compressor Operating Specifications . . . . . . . . . . . . . . . . 1-7

Table 1-5: Cryopump Electrical Outlet Pin Assignments . . . . . . . . . . . . . . . . 1-10

Table 1-6: Compressor Remote Connector Pin Assignments . . . . . . . . . . . . . 1-11

Table 4-1: 9600 Compressor Helium Static Charge . . . . . . . . . . . . . . . . . . . . . 4-1

Table 5-1: Suggested Maintenance Equipment . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

Table C-1: Compressor Troubleshooting Procedures . . . . . . . . . . . . . . . . . . . . C-2

7 P/N 8040540