Olicom 9600 manual Multiple Cryo-Torr Cryopump Connections

9600 Compressor Installation, Operation, and Maintenance

CTI-CRYOGENICS

HELIX TECHNOLOGY CORPORATION

Multiple Cryo-Torr Cryopump Connections

The Cryo-Torr Interface permits the connection of multiple Cryo-Torr Cryopumps to one Compressor as shown in Figure 1-6. Refer to Section 3 - Installation for more information on connecting single or multiple Cryo-Torr Cryopumps to the Compressor.

HELIUM SUPPLY

HELIUM RETURN

REMOTE

WATERPOWER

CRYO-TORR

INTERFACE

CRYOPUMP POWER

CABLE

USER REMOTE

(FROM VACUUM SYSTEM)

Figure 1-6: 9600 Compressor Connected to Multiple Cryo-Torr Cryopumps

NOTE: Your installation (number of pumps per compressor) will vary based upon the Cryo-Torr Cryopump models used. Refer to Appendix A to consult your local CTI-CRYOGENICS Customer Support Center for information on specific compressor/cryopump applications.

P/N 8040540 1-13