9600 Compressor Installation, Operation, and Maintenance
CTI-CRYOGENICS
HELIX TECHNOLOGY CORPORATION
Multiple On-Board Cryopump Connections
CAUTION
Make sure the Compressor power is OFF before making any connections to the rear panel.
Helium Line Connections
CAUTION
The use of several compressors on a single manifold feeding a common supply header and a common return header requires special precautions. Contact
1.Connect the Supply and Return lines to the 9600 Compressor as described in Connecting/Disconnecting Helium Flex Lines within this section.
2.Connect the Gas Return Line to the customer supplied helium manifold and then to the GAS RETURN connector on the
3.Connect the Gas Supply Line to the customer supplied helium manifold and then to the GAS SUPPLY connector on the
P/N 8040540 |