Olicom 9600 manual Compressor Connected to Multiple On-Board Cryopumps

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9600 Compressor Description

HELIUM SUPPLY

HELIUM RETURN

REMOTE

WATERPOWER

ON-BOARD POWER

CABLE

CTI-CRYOGENICS

HELIX TECHNOLOGY CORPORATION

ON-BOARD SPLITTER

BOX

Figure 1-5: 9600 Compressor Connected to Multiple On-Board Cryopumps

NOTE: Your installation (number of pumps per compressor) will vary based upon the On-Board Cryopumps or Waterpumps used. Refer to Appendix A to consult your local CTI-CRYOGENICS Customer Support Center for information on specific compressor/pump applications.

1-12	P/N 8040540

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Contents 8040540 Rev 12/2004 Compressor Installation, Operation, Maintenance InstructionsHelix Page Table of Contents Maintenance InstallationOperation Figures Tables Benefits Compressor Configurations9600 Compressor Description GeneralCTI-CRYOGENICS Helium Refrigeration System System Documentation9600 Compressor Dimensions SpecificationsElectrical WeightCompressor Weight Electrical Input SpecificationsCooling Water Cooling Water SpecificationsGeneral General Compressor Operating Specifications9600 Compressor Rear View Component Locations Component DescriptionControl Circuit Breaker Power on IndicatorPower Inlet System Circuit BreakerCryopump Electrical Outlet Pin Assignments Return Gas CouplingCooling Water OUT Cryopump Electrical OutletMultiple On-Board Cryopump Connections Cryopump Power Phase SwitchCompressor Remote Connector Compressor Remote Connector Pin Assignments9600 Compressor Connected to Multiple On-Board Cryopumps 9600 Compressor Connected to Multiple Cryo-Torr Cryopumps Multiple Cryo-Torr Cryopump ConnectionsCTI-CRYOGENICS Removal from Shipping Carton Unpacking and InspectionIntroduction Shipping Carton InspectionHelium Static Pressure Verification Shipping Carton ContentsCompressor Inspection CompressorInstallation END Hard Water Lines Supply and Return Water Line ConnectionsFlexible Water Lines Electrical Connections Power Cable Preparation9600 Compressor Circuit Breaker Terminals Cover Removed Proceed with Cryopump Power Phase Switch Setting Phase CheckCryopump Power Phase Switch Setting Connecting/Disconnecting Helium Flex LinesConnecting Disconnecting Single On-Board Cryopump Connections Single On-Board Cryopump ConnectionsSingle Cryo-Torr Cryopump Connections Single Cryo-Torr Cryopump InstallationHelium Line Connections Power Cable Connections Multiple Cryo-Torr Cryopump Connections CTI-CRYOGENICS Recommended Multiple Cryo-Torr Cryopump Installation Alternative Multiple Cryo-Torr Cryopump Installation 9600 Compressor Helium Static Charge Adjusting System Helium PressureOperation Static Helium System Pressure VerificationCompressor Operation Replacement of Helium Circuit Components CTI-CRYOGENICS Scheduled Maintenance MaintenanceSuggested Maintenance Equipment Disconnecting Self Sealing Couplings Adsorber ReplacementDate 9600 Compressor Helium Pressure Control Components Reducing Helium PressureAdding Helium Increasing Helium PressureCTI-CRYOGENICS Mail Appendix a Customer Support InformationProduct Information Page Figure B-19600 Compressor Flow Diagram Appendix B Flow DiagramAppendix B Flow Diagram Troubleshooting the Compressor Appendix C Troubleshooting ProceduresTechnical Inquiries Compressor Remote Table C-1 Compressor Troubleshooting ProceduresAppendix a to contact CTI-CRYOGENICS Appendix D Schematic Figure D-19600 Motor Drive Compressor Schematic