Olicom 9600 manual Alternative Multiple Cryo-Torr Cryopump Installation

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Installation

CTI-CRYOGENICS

HELIX TECHNOLOGY CORPORATION

HELIUM SUPPLY

HELIUM RETURN

REMOTE

CRYO-TORR

INTERFACE

CRYOPUMP POWER CABLES

WATER	POWER	USER REMOTE
		(FROM VACUUM SYSTEM)

Figure 3-9: Alternative Multiple Cryo-Torr Cryopump Installation

3-16	P/N 8040540

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Contents 8040540 Rev 12/2004 Compressor Installation, Operation, Maintenance InstructionsHelix Page Table of Contents Installation MaintenanceOperation Figures Tables Benefits Compressor Configurations9600 Compressor Description GeneralCTI-CRYOGENICS Helium Refrigeration System System Documentation9600 Compressor Dimensions SpecificationsElectrical WeightCompressor Weight Electrical Input SpecificationsCooling Water Cooling Water SpecificationsGeneral General Compressor Operating Specifications9600 Compressor Rear View Component Locations Component DescriptionControl Circuit Breaker Power on IndicatorPower Inlet System Circuit BreakerCryopump Electrical Outlet Pin Assignments Return Gas CouplingCooling Water OUT Cryopump Electrical OutletMultiple On-Board Cryopump Connections Cryopump Power Phase SwitchCompressor Remote Connector Compressor Remote Connector Pin Assignments9600 Compressor Connected to Multiple On-Board Cryopumps 9600 Compressor Connected to Multiple Cryo-Torr Cryopumps Multiple Cryo-Torr Cryopump ConnectionsCTI-CRYOGENICS Removal from Shipping Carton Unpacking and InspectionIntroduction Shipping Carton InspectionHelium Static Pressure Verification Shipping Carton ContentsCompressor Inspection CompressorInstallation END Supply and Return Water Line Connections Hard Water LinesFlexible Water Lines Electrical Connections Power Cable Preparation9600 Compressor Circuit Breaker Terminals Cover Removed Proceed with Cryopump Power Phase Switch Setting Phase CheckConnecting/Disconnecting Helium Flex Lines Cryopump Power Phase Switch SettingConnecting Disconnecting Single On-Board Cryopump Connections Single On-Board Cryopump ConnectionsSingle Cryo-Torr Cryopump Connections Single Cryo-Torr Cryopump InstallationHelium Line Connections Power Cable Connections Multiple Cryo-Torr Cryopump Connections CTI-CRYOGENICS Recommended Multiple Cryo-Torr Cryopump Installation Alternative Multiple Cryo-Torr Cryopump Installation 9600 Compressor Helium Static Charge Adjusting System Helium PressureOperation Static Helium System Pressure VerificationCompressor Operation Replacement of Helium Circuit Components CTI-CRYOGENICS Maintenance Scheduled MaintenanceSuggested Maintenance Equipment Disconnecting Self Sealing Couplings Adsorber ReplacementDate 9600 Compressor Helium Pressure Control Components Reducing Helium PressureAdding Helium Increasing Helium PressureCTI-CRYOGENICS Appendix a Customer Support Information MailProduct Information Page Figure B-19600 Compressor Flow Diagram Appendix B Flow DiagramAppendix B Flow Diagram Appendix C Troubleshooting Procedures Troubleshooting the CompressorTechnical Inquiries Compressor Remote Table C-1 Compressor Troubleshooting ProceduresAppendix a to contact CTI-CRYOGENICS Appendix D Schematic Figure D-19600 Motor Drive Compressor Schematic