Olicom 9600 manual Compressor Description, General, Benefits, Compressor Configurations

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9600 Compressor Installation, Operation, and Maintenance

CTI-CRYOGENICS

HELIX TECHNOLOGY CORPORATION

Section 1 - 9600 Compressor Description

General

This manual provides the information required to install, operate, and maintain the CTI-CRYOGENICS 9600 Compressor.

NOTE: All personnel with installation, operation, and maintenance responsibilities should become familiar with the contents of both the 9600 Compressor Installation, Operation, Maintenance, and appropriate cryopump manuals to ensure safe, high quality, and reliable system performance.

Benefits

The 9600 Compressor is a universal compressor that accepts three-phase 50Hz or 60 Hz power input and provides two-phase or three- phase 60Hz power output to On-Board or Cryo-Torr Cryopumps.

The 9600 Compressor design eliminates the use of three-phase motor controllers and/or frequency converters and significantly reduces the amount of equipment required and cost associated with the Cryopump power circuit.

CAUTION

Refer to Appendix A to contact the local Customer Support Center for information on connecting 9600 Compressors to a manifold with other CTI-CRYOGENICS compressors.

Compressor Configurations

The 9600 Compressor supports either On-Board or Cryo-Torr Cryopumps. For multiple cryopump installations, an On-Board Splitter Box or Cryo- Torr Interface can be used for cold head power distribution that reduces total cable requirements as shown in Figure 1-5 and 1-6.

P/N 8040540

1-1

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Contents Compressor Installation, Operation, Maintenance Instructions 8040540 Rev 12/2004Helix Page Table of Contents Operation InstallationMaintenance Figures Tables Compressor Configurations 9600 Compressor DescriptionGeneral BenefitsSystem Documentation CTI-CRYOGENICS Helium Refrigeration System9600 Compressor Specifications DimensionsWeight Compressor WeightElectrical Input Specifications ElectricalCooling Water Specifications Cooling WaterGeneral Compressor Operating Specifications GeneralComponent Description 9600 Compressor Rear View Component LocationsPower on Indicator Power InletSystem Circuit Breaker Control Circuit BreakerReturn Gas Coupling Cooling Water OUTCryopump Electrical Outlet Cryopump Electrical Outlet Pin AssignmentsCryopump Power Phase Switch Compressor Remote ConnectorCompressor Remote Connector Pin Assignments Multiple On-Board Cryopump Connections9600 Compressor Connected to Multiple On-Board Cryopumps Multiple Cryo-Torr Cryopump Connections 9600 Compressor Connected to Multiple Cryo-Torr CryopumpsCTI-CRYOGENICS Unpacking and Inspection IntroductionShipping Carton Inspection Removal from Shipping CartonShipping Carton Contents Compressor InspectionCompressor Helium Static Pressure VerificationInstallation END Flexible Water Lines Supply and Return Water Line ConnectionsHard Water Lines Power Cable Preparation Electrical Connections9600 Compressor Circuit Breaker Terminals Cover Removed Phase Check Proceed with Cryopump Power Phase Switch SettingConnecting Connecting/Disconnecting Helium Flex LinesCryopump Power Phase Switch Setting Disconnecting Single On-Board Cryopump Connections Single On-Board Cryopump ConnectionsSingle Cryo-Torr Cryopump Installation Single Cryo-Torr Cryopump ConnectionsHelium Line Connections Power Cable Connections Multiple Cryo-Torr Cryopump Connections CTI-CRYOGENICS Recommended Multiple Cryo-Torr Cryopump Installation Alternative Multiple Cryo-Torr Cryopump Installation Adjusting System Helium Pressure OperationStatic Helium System Pressure Verification 9600 Compressor Helium Static ChargeCompressor Operation Replacement of Helium Circuit Components CTI-CRYOGENICS Suggested Maintenance Equipment MaintenanceScheduled Maintenance Adsorber Replacement Disconnecting Self Sealing CouplingsDate Reducing Helium Pressure 9600 Compressor Helium Pressure Control ComponentsIncreasing Helium Pressure Adding HeliumCTI-CRYOGENICS Product Information Appendix a Customer Support InformationMail Page Appendix B Flow Diagram Figure B-19600 Compressor Flow DiagramAppendix B Flow Diagram Technical Inquiries Appendix C Troubleshooting ProceduresTroubleshooting the Compressor Table C-1 Compressor Troubleshooting Procedures Compressor RemoteAppendix a to contact CTI-CRYOGENICS Appendix D Schematic Figure D-19600 Motor Drive Compressor Schematic