Olicom 9600 manual Installation

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9600 Compressor Installation, Operation, and Maintenance

CTI-CRYOGENICS

HELIX TECHNOLOGY CORPORATION

Section 3 - Installation

Introduction

Section 3 provides you with the information required to install the 9600 Compressor and connect it to single or multiple On-Board or Cryo-Torr Cryopump configurations.

Figure 3-1 highlights the major tasks for Compressor installation and refers to the appropriate installation procedures within this section.

P/N 8040540

3-1

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Contents Compressor Installation, Operation, Maintenance Instructions 8040540 Rev 12/2004Helix Page Table of Contents Installation MaintenanceOperation Figures Tables Compressor Configurations 9600 Compressor DescriptionGeneral BenefitsSystem Documentation CTI-CRYOGENICS Helium Refrigeration System9600 Compressor Specifications DimensionsWeight Compressor WeightElectrical Input Specifications ElectricalCooling Water Specifications Cooling WaterGeneral Compressor Operating Specifications GeneralComponent Description 9600 Compressor Rear View Component LocationsPower on Indicator Power InletSystem Circuit Breaker Control Circuit BreakerReturn Gas Coupling Cooling Water OUTCryopump Electrical Outlet Cryopump Electrical Outlet Pin AssignmentsCryopump Power Phase Switch Compressor Remote ConnectorCompressor Remote Connector Pin Assignments Multiple On-Board Cryopump Connections9600 Compressor Connected to Multiple On-Board Cryopumps Multiple Cryo-Torr Cryopump Connections 9600 Compressor Connected to Multiple Cryo-Torr CryopumpsCTI-CRYOGENICS Unpacking and Inspection IntroductionShipping Carton Inspection Removal from Shipping CartonShipping Carton Contents Compressor InspectionCompressor Helium Static Pressure VerificationInstallation END Supply and Return Water Line Connections Hard Water LinesFlexible Water Lines Power Cable Preparation Electrical Connections9600 Compressor Circuit Breaker Terminals Cover Removed Phase Check Proceed with Cryopump Power Phase Switch SettingConnecting/Disconnecting Helium Flex Lines Cryopump Power Phase Switch SettingConnecting Disconnecting Single On-Board Cryopump Connections Single On-Board Cryopump ConnectionsSingle Cryo-Torr Cryopump Installation Single Cryo-Torr Cryopump ConnectionsHelium Line Connections Power Cable Connections Multiple Cryo-Torr Cryopump Connections CTI-CRYOGENICS Recommended Multiple Cryo-Torr Cryopump Installation Alternative Multiple Cryo-Torr Cryopump Installation Adjusting System Helium Pressure OperationStatic Helium System Pressure Verification 9600 Compressor Helium Static ChargeCompressor Operation Replacement of Helium Circuit Components CTI-CRYOGENICS Maintenance Scheduled MaintenanceSuggested Maintenance Equipment Adsorber Replacement Disconnecting Self Sealing CouplingsDate Reducing Helium Pressure 9600 Compressor Helium Pressure Control ComponentsIncreasing Helium Pressure Adding HeliumCTI-CRYOGENICS Appendix a Customer Support Information MailProduct Information Page Appendix B Flow Diagram Figure B-19600 Compressor Flow DiagramAppendix B Flow Diagram Appendix C Troubleshooting Procedures Troubleshooting the CompressorTechnical Inquiries Table C-1 Compressor Troubleshooting Procedures Compressor RemoteAppendix a to contact CTI-CRYOGENICS Appendix D Schematic Figure D-19600 Motor Drive Compressor Schematic