Olicom 9600 manual Single On-Board Cryopump Connections

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9600 Compressor Installation, Operation, and Maintenance

CTI-CRYOGENICS

HELIX TECHNOLOGY CORPORATION

Single On-Board Cryopump Connections

CAUTION

Make sure the Compressor power is OFF before making any connections to the rear panel.

1.Connect the Supply and Return lines to the 9600 Compressor as described in Connecting/Disconnecting Helium Flex Lines within this section.

2.Connect one end of the Cryopump cold head cable to the CRYOPUMP ELECTRICAL OUTLET on the rear panel of the Compressor as shown in Figure 3-4.

3.Connect the opposite end of the cold head cable to the cryopump cold head cable connector.

HELIUM SUPPLY

HELIUM RETURN

REMOTE

ON-BOARD

POWER CABLE

WATERPOWER

Figure 3-4: Single On-Board Cryopump Connections

P/N 8040540

3-9

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Contents Compressor Installation, Operation, Maintenance Instructions 8040540 Rev 12/2004Helix Page Table of Contents Operation InstallationMaintenance Figures Tables Compressor Configurations 9600 Compressor DescriptionGeneral BenefitsSystem Documentation CTI-CRYOGENICS Helium Refrigeration System9600 Compressor Specifications DimensionsWeight Compressor WeightElectrical Input Specifications ElectricalCooling Water Specifications Cooling WaterGeneral Compressor Operating Specifications GeneralComponent Description 9600 Compressor Rear View Component LocationsPower on Indicator Power InletSystem Circuit Breaker Control Circuit BreakerReturn Gas Coupling Cooling Water OUTCryopump Electrical Outlet Cryopump Electrical Outlet Pin AssignmentsCryopump Power Phase Switch Compressor Remote ConnectorCompressor Remote Connector Pin Assignments Multiple On-Board Cryopump Connections9600 Compressor Connected to Multiple On-Board Cryopumps Multiple Cryo-Torr Cryopump Connections 9600 Compressor Connected to Multiple Cryo-Torr CryopumpsCTI-CRYOGENICS Unpacking and Inspection IntroductionShipping Carton Inspection Removal from Shipping CartonShipping Carton Contents Compressor InspectionCompressor Helium Static Pressure VerificationInstallation END Flexible Water Lines Supply and Return Water Line ConnectionsHard Water Lines Power Cable Preparation Electrical Connections9600 Compressor Circuit Breaker Terminals Cover Removed Phase Check Proceed with Cryopump Power Phase Switch SettingConnecting Connecting/Disconnecting Helium Flex LinesCryopump Power Phase Switch Setting Disconnecting Single On-Board Cryopump Connections Single On-Board Cryopump ConnectionsSingle Cryo-Torr Cryopump Installation Single Cryo-Torr Cryopump ConnectionsHelium Line Connections Power Cable Connections Multiple Cryo-Torr Cryopump Connections CTI-CRYOGENICS Recommended Multiple Cryo-Torr Cryopump Installation Alternative Multiple Cryo-Torr Cryopump Installation Adjusting System Helium Pressure OperationStatic Helium System Pressure Verification 9600 Compressor Helium Static ChargeCompressor Operation Replacement of Helium Circuit Components CTI-CRYOGENICS Suggested Maintenance Equipment MaintenanceScheduled Maintenance Adsorber Replacement Disconnecting Self Sealing CouplingsDate Reducing Helium Pressure 9600 Compressor Helium Pressure Control ComponentsIncreasing Helium Pressure Adding HeliumCTI-CRYOGENICS Product Information Appendix a Customer Support InformationMail Page Appendix B Flow Diagram Figure B-19600 Compressor Flow DiagramAppendix B Flow Diagram Technical Inquiries Appendix C Troubleshooting ProceduresTroubleshooting the Compressor Table C-1 Compressor Troubleshooting Procedures Compressor RemoteAppendix a to contact CTI-CRYOGENICS Appendix D Schematic Figure D-19600 Motor Drive Compressor Schematic