9600 Compressor Installation, Operation, and Maintenance
CTI-CRYOGENICS
HELIX TECHNOLOGY CORPORATION
Single On-Board Cryopump Connections
CAUTION
Make sure the Compressor power is OFF before making any connections to the rear panel.
1.Connect the Supply and Return lines to the 9600 Compressor as described in Connecting/Disconnecting Helium Flex Lines within this section.
2.Connect one end of the Cryopump cold head cable to the CRYOPUMP ELECTRICAL OUTLET on the rear panel of the Compressor as shown in Figure
3.Connect the opposite end of the cold head cable to the cryopump cold head cable connector.
HELIUM SUPPLY |
HELIUM RETURN |
REMOTE |
POWER CABLE
WATERPOWER
Figure 3-4: Single On-Board Cryopump Connections
P/N 8040540 |