Olicom 9600 manual Recommended Multiple Cryo-Torr Cryopump Installation

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9600 Compressor Installation, Operation, and Maintenance

CTI-CRYOGENICS

HELIX TECHNOLOGY CORPORATION

NOTE: The Cryo-Torr Interface can be installed at the process tool containing the cryopumps as shown in Figure 3-8 or near the Compressor as shown in Figure 3-9. CTI-CRYOGENICS recommends that the Cryo- Torr Interface be installed at the process tool to reduce cable requirements.

HELIUM SUPPLY

HELIUM RETURN

REMOTE

WATERPOWER

CRYO-TORR

INTERFACE

CRYOPUMP POWER CABLE

USER REMOTE

(FROM VACUUM SYSTEM)

Figure 3-8: Recommended Multiple Cryo-Torr Cryopump Installation

P/N 8040540

3-15

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Contents Compressor Installation, Operation, Maintenance Instructions 8040540 Rev 12/2004Helix Page Table of Contents Operation InstallationMaintenance Figures Tables General Compressor Configurations9600 Compressor Description BenefitsSystem Documentation CTI-CRYOGENICS Helium Refrigeration System9600 Compressor Specifications DimensionsElectrical Input Specifications WeightCompressor Weight ElectricalCooling Water Specifications Cooling WaterGeneral Compressor Operating Specifications GeneralComponent Description 9600 Compressor Rear View Component LocationsSystem Circuit Breaker Power on IndicatorPower Inlet Control Circuit BreakerCryopump Electrical Outlet Return Gas CouplingCooling Water OUT Cryopump Electrical Outlet Pin AssignmentsCompressor Remote Connector Pin Assignments Cryopump Power Phase SwitchCompressor Remote Connector Multiple On-Board Cryopump Connections9600 Compressor Connected to Multiple On-Board Cryopumps Multiple Cryo-Torr Cryopump Connections 9600 Compressor Connected to Multiple Cryo-Torr CryopumpsCTI-CRYOGENICS Shipping Carton Inspection Unpacking and InspectionIntroduction Removal from Shipping CartonCompressor Shipping Carton ContentsCompressor Inspection Helium Static Pressure VerificationInstallation END Flexible Water Lines Supply and Return Water Line ConnectionsHard Water Lines Power Cable Preparation Electrical Connections9600 Compressor Circuit Breaker Terminals Cover Removed Phase Check Proceed with Cryopump Power Phase Switch SettingConnecting Connecting/Disconnecting Helium Flex LinesCryopump Power Phase Switch Setting Disconnecting Single On-Board Cryopump Connections Single On-Board Cryopump ConnectionsSingle Cryo-Torr Cryopump Installation Single Cryo-Torr Cryopump ConnectionsHelium Line Connections Power Cable Connections Multiple Cryo-Torr Cryopump Connections CTI-CRYOGENICS Recommended Multiple Cryo-Torr Cryopump Installation Alternative Multiple Cryo-Torr Cryopump Installation Static Helium System Pressure Verification Adjusting System Helium PressureOperation 9600 Compressor Helium Static ChargeCompressor Operation Replacement of Helium Circuit Components CTI-CRYOGENICS Suggested Maintenance Equipment MaintenanceScheduled Maintenance Adsorber Replacement Disconnecting Self Sealing CouplingsDate Reducing Helium Pressure 9600 Compressor Helium Pressure Control ComponentsIncreasing Helium Pressure Adding HeliumCTI-CRYOGENICS Product Information Appendix a Customer Support InformationMail Page Appendix B Flow Diagram Figure B-19600 Compressor Flow DiagramAppendix B Flow Diagram Technical Inquiries Appendix C Troubleshooting ProceduresTroubleshooting the Compressor Table C-1 Compressor Troubleshooting Procedures Compressor RemoteAppendix a to contact CTI-CRYOGENICS Appendix D Schematic Figure D-19600 Motor Drive Compressor Schematic