Sigma
manual
SQC-122c Thin Film Deposition Controller User’s Guide
Specs
Safety Symbols
Connector Wiring Relay Pins
Warranty
Quick Setup
Chapter Operation Loop Tuning
Power Input Fuse
Edit Mode Layer
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SQC-122c
Thin Film Deposition Controller
User’s Guide
Version 2.0
© Copyright Sigma Instruments, Inc. 1999 - 2002
Sigma
instruments
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Contents
SQC-122c Thin Film Deposition Controller User’s Guide
Safety Symbols
Safety Information
Limitation of Warranty
Warranty Information
Return Policy
Chapter Operation
Table of Contents Chapter Quick Start
Chapter Menus
Chapter Options
Appendix
Thin Film Process Overview
Chapter Quick Start Introduction
Chapter Quick Start Front Panel
Chapter Quick Start Rear Panel
Power Input Fuse
Chapter Quick Start System Connections
Chapter Quick Start Installation
Power
Chapter Quick Start Process Setup
Quick Setup
Select
Chapter Quick Start
Edit Mode Layer
Exit to Main
Chapter Quick Start Depositing a Film
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Definitions
Chapter Operation Introduction
Defining a Film
POWER%
POWER%
Deposition Controls Menu
Layer Edit Menu
Chapter Operation Defining a Process
Chapter Operation
Chapter Operation Sensor Setup
Tooling U n d e r 1 0 0 %
Chapter Operation
Chapter Operation Source Setup
Chapter Operation Running a Process
Chapter Operation
Next Menu Zero THICKNESSkA RATEA/s
824 55.3
Chapter Operation Loop Tuning
Chapter Operation
No Readings, or Erratic Readings from Sensors
Chapter Operation Troubleshooting
Poor Rate Stability
Incorrect Rate or Thickness Measurement
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Chapter Menus Introduction
Chapter Menus Main Menu
Default, power-up Main Screen display is shown below
Next
Setup
Menu Quick
Film
Chapter Menus Next Menu Screens
Exit to Main Edit
Chapter Menus Quick Setup Menu
Prev Layer
Next Layer
Chapter Menus
Main Screen Prev Menu Select Edit Delete Control Knob
Chapter Menus Process Menus
Insert Layer Control Knob
Main Screen Prev Menu Edit Cut Paste
Exit to Main Prev Menu Edit Control Knob
POWER%
Chapter Menus
Main Screen Prev Menu Edit Delete Control Knob
Chapter Menus Film Menus
Exit to Main Prev Menu Edit
Exit to Main Prev Menu Edit THICKNESSkA RATEA/s
Deposition Controls Menu
Chapter Menus
Chapter Menus
Chapter Menus
Chapter Menus System Parameters Menu
Chapter Menus
Chapter Menus
Mapping Menu
Chapter Menus I/O Setup
Inputs Explanation high input causes
Relays Explanation closes when
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Chapter Options Introduction
Full Rack Extender Installation
Option Card
Appendix Material Parameters
General Specifications
Appendix Specifications
Measurement
Source
Display
Input Pins
Connector Wiring Relay Pins
Appendix O Connections
Appendix
Appendix Handheld Remote Controller
Appendix EC Declaration of Conformity
Complies with the Essential Health and Safety Requirements
Declares that the product
Uses the following standards
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