Sigma manual SQC-122c Thin Film Deposition Controller User’s Guide

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SQC-122c

Thin Film Deposition Controller

User’s Guide

Version 2.0

© Copyright Sigma Instruments, Inc. 1999 - 2002

Sigma

instruments

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Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Symbols Safety InformationLimitation of Warranty Warranty InformationReturn Policy Chapter Operation Table of Contents Chapter Quick StartChapter Menus Chapter OptionsAppendix Thin Film Process Overview Chapter Quick Start IntroductionChapter Quick Start Front Panel Chapter Quick Start Rear Panel Power Input FuseChapter Quick Start System Connections Chapter Quick Start Installation Power Chapter Quick Start Process SetupQuick Setup SelectChapter Quick Start Edit Mode LayerExit to Main Chapter Quick Start Depositing a Film This page left blank for your notes Definitions Chapter Operation IntroductionDefining a Film POWER% POWER% Deposition Controls Menu Layer Edit Menu Chapter Operation Defining a ProcessChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation No Readings, or Erratic Readings from Sensors Chapter Operation TroubleshootingPoor Rate Stability Incorrect Rate or Thickness MeasurementThis page left blank for your notes Chapter Menus Introduction Chapter Menus Main Menu Default, power-up Main Screen display is shown belowNext SetupMenu Quick FilmChapter Menus Next Menu Screens Exit to Main Edit Chapter Menus Quick Setup MenuPrev Layer Next LayerChapter Menus Main Screen Prev Menu Select Edit Delete Control Knob Chapter Menus Process MenusInsert Layer Control Knob Main Screen Prev Menu Edit Cut PasteExit to Main Prev Menu Edit Control Knob POWER%Chapter Menus Main Screen Prev Menu Edit Delete Control Knob Chapter Menus Film MenusExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Mapping Menu Chapter Menus I/O SetupInputs Explanation high input causes Relays Explanation closes whenThis page left blank for your notes Chapter Options Introduction Full Rack Extender InstallationOption Card Appendix Material Parameters General Specifications Appendix SpecificationsMeasurement SourceDisplay Input Pins Connector Wiring Relay PinsAppendix O Connections Appendix Appendix Handheld Remote Controller Appendix EC Declaration of Conformity Complies with the Essential Health and Safety RequirementsDeclares that the product Uses the following standards
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