Sigma SQC-122c manual Appendix Material Parameters

Page 58

Appendix

A.Material Parameters

 

Material

Density

ZFactor

 

Material

Density

ZFactor

 

 

Aluminum

2.73

1.08

 

Magnesium Fluoride

3

1

 

 

Aluminum Oxide

3.97

1

 

Manganese

7.2

0.377

 

 

Antimony

6.62

0.768

 

Manganese Sulfide

3.99

0.94

 

 

Arsenic

5.73

0.966

 

Mercury

13.46

0.74

 

 

Barium

3.5

2.1

 

Molybdenum

10.2

0.257

 

 

Beryllium

1.85

0.543

 

Neodymium Fluoride

6.506

1

 

 

Bismuth

9.8

0.79

 

Neodymium Oxide

7.24

1

 

 

Bismuth Oxide

8.9

1

 

Nickel

8.91

0.331

 

 

Boron

2.54

0.389

 

Niobium

8.57

0.493

 

 

Cadmium

8.64

0.682

 

Niobium Oxide

4.47

1

 

 

Cadmium Selenium

5.81

1

 

Palladium

12

0.357

 

 

Cadmium Sulfide

4.83

1.02

 

Platinum

21.4

0.245

 

 

Cadmium Teluridium

5.85

0.98

 

Potassium Chloride

1.98

2.05

 

 

Calcium

1.55

2.62

 

Rhenium

21.04

0.15

 

 

Calcium Fluoride

3.18

0.775

 

Rhodium

12.41

0.21

 

 

Carbon Diamond

3.52

0.22

 

Samarium

7.54

0.89

 

 

Carbon Graphite

2.25

3.26

 

Scandium

3

0.91

 

 

Cerium Fluoride

6.16

1

 

Selenium

4.82

0.864

 

 

Cerium Oxide

7.13

1

 

Silicon

2.32

0.712

 

 

Chromium

7.2

0.305

 

Silicon Dioxide

2.2

1.07

 

 

Chromium Oxide

5.21

1

 

Silicon Oxide

2.13

0.87

 

 

Cobalt

8.71

0.343

 

Silver

10.5

0.529

 

 

Copper

8.93

0.437

 

Silver Bromide

6.47

1.18

 

 

Copper Sulfide

4.6

0.82

 

Silver Chloride

5.56

1.32

 

 

Copper Sulfide B

5.8

0.67

 

Sodium

0.97

4.8

 

 

Copper Sulfide A

5.6

0.69

 

Sodium Chloride

2.17

1.57

 

 

Dysprosium

8.54

0.6

 

Sulfur

2.07

2.29

 

 

Erbium

9.05

0.74

 

Tantalum

16.6

0.262

 

 

Gadolinium

7.89

0.67

 

Tantalum Oxide

8.2

0.3

 

 

Gallium

5.93

0.593

 

Tellurium

6.25

0.9

 

 

Gallium Arsenide

5.31

1.59

 

Terbium

8.27

0.66

 

 

Germanium

5.35

0.516

 

Thallium

11.85

1.55

 

 

Gold

19.3

.381

 

Thorium Fluoride

6.32

1

 

 

Hafnium

13.1

0.36

 

Tin

7.3

0.724

 

 

Hafnium Oxide

9.63

1

 

Titanium

4.5

0.628

 

 

Holnium

8.8

0.58

 

Titanium Oxide

4.9

1

 

 

Indium

7.3

0.841

 

Titanium Oxide IV

4.26

0.4

 

 

Indium Intimnide

5.76

0.769

 

Tungsten

19.3

0.163

 

 

Indium Oxide

7.18

1

 

Tungsten Carbide

15.6

0.151

 

 

Iridium

22.4

0.129

 

Uranium

18.7

0.238

 

 

Iron

7.86

0.349

 

Vanadium

5.96

0.53

 

 

Lanthanum

6.17

0.92

 

Ytterbium

6.98

1.13

 

 

Lanthanum Fluoride

5.94

1

 

Yttrium

4.34

0.835

 

 

Lanthanum Oxide

6.51

1

 

Yttrium Oxide

5.01

1

 

 

Lead

11.3

1.13

 

Zinc

7.04

0.514

 

 

Lead Sulfide

7.5

0.566

 

Zinc Oxide

5.61

0.556

 

 

Lithium

0.53

5.9

 

Zinc Selenide

5.26

0.722

 

 

Lithium Fluoride

2.64

0.774

 

Zinc Sulfide

4.09

0.775

 

 

Magnesium

1.74

1.61

 

Zirconium Oxide

5.6

1.001

 

 

 

 

 

 

 

 

 

 

Image 58
Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Information Safety SymbolsLimitation of Warranty Warranty InformationReturn Policy Chapter Menus Table of Contents Chapter Quick StartChapter Operation Chapter OptionsAppendix Chapter Quick Start Introduction Thin Film Process OverviewChapter Quick Start Front Panel Power Input Fuse Chapter Quick Start Rear PanelChapter Quick Start System Connections Chapter Quick Start Installation Quick Setup Chapter Quick Start Process SetupPower SelectChapter Quick Start Edit Mode LayerExit to Main Chapter Quick Start Depositing a Film This page left blank for your notes Definitions Chapter Operation IntroductionDefining a Film POWER% POWER% Deposition Controls Menu Chapter Operation Defining a Process Layer Edit MenuChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation Chapter Operation Troubleshooting No Readings, or Erratic Readings from SensorsIncorrect Rate or Thickness Measurement Poor Rate StabilityThis page left blank for your notes Chapter Menus Introduction Default, power-up Main Screen display is shown below Chapter Menus Main MenuMenu Quick SetupNext FilmChapter Menus Next Menu Screens Prev Layer Chapter Menus Quick Setup MenuExit to Main Edit Next LayerChapter Menus Chapter Menus Process Menus Main Screen Prev Menu Select Edit Delete Control KnobMain Screen Prev Menu Edit Cut Paste Insert Layer Control KnobPOWER% Exit to Main Prev Menu Edit Control KnobChapter Menus Chapter Menus Film Menus Main Screen Prev Menu Edit Delete Control KnobExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Chapter Menus I/O Setup Mapping MenuRelays Explanation closes when Inputs Explanation high input causesThis page left blank for your notes Chapter Options Introduction Full Rack Extender InstallationOption Card Appendix Material Parameters Measurement Appendix SpecificationsGeneral Specifications SourceDisplay Input Pins Connector Wiring Relay PinsAppendix O Connections Appendix Appendix Handheld Remote Controller Declares that the product Complies with the Essential Health and Safety RequirementsAppendix EC Declaration of Conformity Uses the following standards