Appendix
Display
Graphs Readouts
Process Parameters (a Process is a sequence of layers)
#Processes
#Films
#Layers (total all processes)
Layer Parameters (Layer is a Film, plus these values) Initial Rate
Final Thickness
Time Setpoint
Thickness Limit Start Mode
#Rate Ramps Rate Ramp Start Rate Ramp Time New Rate
Film Parameters (Film is a Material, plus these values) Material
Density
PTerm I Term D Term Sensor (1,2) Output Pocket Max Power Slew Rate Crystal Quality Crystal Stability Crystal Fail Mode
Ramp1, Ramp2, Feed Ramp, Feed, Idle Ramp Time Soak1, Soak2, Feed, Idle Power
Shutter Delay Time Shutter Delay Error
Control Error Control Error Setting
Rate Sampling Sample Time Hold Time
Rate, Deviation, Power Thickness, Rate, Power
25
25
250
0.0to 999.9 ? /sec.
0.0to 999.9 ? 0 to 30000 sec.
0.0to 999.9 ? Auto/Manual 2
0.0to 999.9 ? 0 to 1000 sec.
0.0to 999.9 ? /sec.
100 stored
0.40to 99.99 gm/cm3 0.100 to 9.900
1 to 9999
0 to 99.9 sec.
0 to 99.9 sec. On/Off
1 or 2
1 to 8
0.0to 100.0 %
0.0to 100.0 %/sec. Disabled to 30% Disabled to 5000 Hz Halt or Timed Power 0 to 30000 sec.
0.0to 100.0 % 0 to 200 sec.
0.0to 30.0 % Ignore/Stop/Hold 0 to 30.0 % Continuous/Time/Accuracy
10.0to 999.0 sec.
10.0to 999.0 sec.