Sigma SQC-122c manual Chapter Operation Introduction, Definitions, Defining a Film

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Chapter 2

Operation

2.0Introduction

This chapter describes common tasks associated with operating the SQC-122c. It assumes that you understand basic operation of the menus and parameter setup as described in Chapter 1. Detailed definitions of unfamiliar setup parameters can be found under the appropriate menu description in Chapter 3.

2.1Definitions

Several terms will be used repeatedly throughout this manual. It is important that you understand each of these terms.

Material: A physical material to be deposited. A database of approximately 100 materials is stored in the SQC-122c, and additional materials may be added using the setup software. Three parameters completely define a material: Name, Density, and Z- Factor. A table of common materials, their density, and Z-Factor is listed in Appendix A.

Film: A film describes in detail how a material will be deposited. It includes the material definition and all of the preconditioning, deposition, and post conditioning variables necessary to accurately deposit the material. Because the film definition does not include rate and thickness information, a film can be used in several different processes. The SQC-122c stores up to 25 films.

Layer: Layers are the basic building blocks of processes. A layer consists of a film and the thickness and rate that it be deposited in a process.

Process: A deposition process is a sequence of layers (i.e. films, materials) to be deposited. The SQC-122c can store up to 25 processes, consisting of a total of 250 layers.

2.2Defining a Film

A film is a material to be deposited, plus all of its associated setup parameters. Keep in mind that a film can be used in multiple processes. Editing a film’s parameters will cause changes to every process where the film is used.

To define a film, select Film Menu on the main screen. A list of 25 films (or <Empty>) will be displayed. To define a new film, scroll to <Empty> and press Create. A new Film# is added to the list of existing films (you can use the SQC-122c setup software later to assign descriptive film names). Press Edit to display the parameters for this film.

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Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Symbols Safety InformationWarranty Information Limitation of WarrantyReturn Policy Chapter Options Table of Contents Chapter Quick StartChapter Operation Chapter MenusAppendix Thin Film Process Overview Chapter Quick Start IntroductionChapter Quick Start Front Panel Chapter Quick Start Rear Panel Power Input FuseChapter Quick Start System Connections Chapter Quick Start Installation Select Chapter Quick Start Process SetupPower Quick SetupEdit Mode Layer Chapter Quick StartExit to Main Chapter Quick Start Depositing a Film This page left blank for your notes Chapter Operation Introduction DefinitionsDefining a Film POWER% POWER% Deposition Controls Menu Layer Edit Menu Chapter Operation Defining a ProcessChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation No Readings, or Erratic Readings from Sensors Chapter Operation TroubleshootingPoor Rate Stability Incorrect Rate or Thickness MeasurementThis page left blank for your notes Chapter Menus Introduction Chapter Menus Main Menu Default, power-up Main Screen display is shown belowFilm SetupNext Menu QuickChapter Menus Next Menu Screens Next Layer Chapter Menus Quick Setup MenuExit to Main Edit Prev LayerChapter Menus Main Screen Prev Menu Select Edit Delete Control Knob Chapter Menus Process MenusInsert Layer Control Knob Main Screen Prev Menu Edit Cut PasteExit to Main Prev Menu Edit Control Knob POWER%Chapter Menus Main Screen Prev Menu Edit Delete Control Knob Chapter Menus Film MenusExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Mapping Menu Chapter Menus I/O SetupInputs Explanation high input causes Relays Explanation closes whenThis page left blank for your notes Full Rack Extender Installation Chapter Options IntroductionOption Card Appendix Material Parameters Source Appendix SpecificationsGeneral Specifications MeasurementDisplay Connector Wiring Relay Pins Input PinsAppendix O Connections Appendix Appendix Handheld Remote Controller Uses the following standards Complies with the Essential Health and Safety RequirementsAppendix EC Declaration of Conformity Declares that the product