Chapter 2 | Operation |
2.0Introduction
This chapter describes common tasks associated with operating the
2.1Definitions
Several terms will be used repeatedly throughout this manual. It is important that you understand each of these terms.
Material: A physical material to be deposited. A database of approximately 100 materials is stored in the
Film: A film describes in detail how a material will be deposited. It includes the material definition and all of the preconditioning, deposition, and post conditioning variables necessary to accurately deposit the material. Because the film definition does not include rate and thickness information, a film can be used in several different processes. The
Layer: Layers are the basic building blocks of processes. A layer consists of a film and the thickness and rate that it be deposited in a process.
Process: A deposition process is a sequence of layers (i.e. films, materials) to be deposited. The
2.2Defining a Film
A film is a material to be deposited, plus all of its associated setup parameters. Keep in mind that a film can be used in multiple processes. Editing a film’s parameters will cause changes to every process where the film is used.
To define a film, select Film Menu on the main screen. A list of 25 films (or <Empty>) will be displayed. To define a new film, scroll to <Empty> and press Create. A new Film# is added to the list of existing films (you can use the