Sigma SQC-122c manual Chapter Menus System Parameters Menu, Exit to Main Edit

Page 51

Chapter 3

Menus

3.6System Parameters Menu

The System Parameters Menu contains settings that affect the basic operation of the SQC-122c. System parameters generally pertain to the physical setup of your vacuum system equipment.

Exit to Main

Edit

I / O

Setup

THICKNESS(kA)

 

RATE(A/s)

POWER(%)

0.000

0.0

0.0

 

My Process 1 -> Layer 1 -> Aluminum

 

 

 

 

 

 

 

Parameter

 

Value

Units

 

 

 

 

 

 

 

 

 

 

 

Period

. 25

Sec

 

 

 

 

 

 

System Tooling

100

%

 

Xtal Tool 1

100

%

 

Xtal Tool 2

100

%

 

Simulate Mode

 

Off

On/Off

 

Min Frequency

 

5.0e+06

H z

 

Max Frequency

 

6.0e+06

H z

 

Scale 1

2.5

Volts

 

Scale 2

2.6

Volts

 

Contrast

1.5

 

 

Dev Graph Limit

20.0

%

 

 

 

 

 

 

 

Edit System Params Menu

Exit to Main

Edit

Returns to the Main Menu.

Selects the highlighted parameter for edit. SoftKey functions change to:

Next: Store parameter and move to next for editing.

Cancel: Stop editing and undo changes to selected parameter.

Enter: Stop editing and save values for selected parameter.

Control Knob: Turn to adjust value. Push to store value and move to next parameter.

I / O Setup

Displays menu for mapping of inputs and outputs.

Control Knob Scrolls through the list of system parameters.

3-18

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Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Symbols Safety InformationWarranty Information Limitation of WarrantyReturn Policy Chapter Options Table of Contents Chapter Quick StartChapter Operation Chapter MenusAppendix Thin Film Process Overview Chapter Quick Start IntroductionChapter Quick Start Front Panel Chapter Quick Start Rear Panel Power Input FuseChapter Quick Start System Connections Chapter Quick Start Installation Select Chapter Quick Start Process SetupPower Quick SetupEdit Mode Layer Chapter Quick StartExit to Main Chapter Quick Start Depositing a Film This page left blank for your notes Chapter Operation Introduction DefinitionsDefining a Film POWER% POWER% Deposition Controls Menu Layer Edit Menu Chapter Operation Defining a ProcessChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation No Readings, or Erratic Readings from Sensors Chapter Operation TroubleshootingPoor Rate Stability Incorrect Rate or Thickness MeasurementThis page left blank for your notes Chapter Menus Introduction Chapter Menus Main Menu Default, power-up Main Screen display is shown belowFilm SetupNext Menu QuickChapter Menus Next Menu Screens Next Layer Chapter Menus Quick Setup MenuExit to Main Edit Prev LayerChapter Menus Main Screen Prev Menu Select Edit Delete Control Knob Chapter Menus Process MenusInsert Layer Control Knob Main Screen Prev Menu Edit Cut PasteExit to Main Prev Menu Edit Control Knob POWER%Chapter Menus Main Screen Prev Menu Edit Delete Control Knob Chapter Menus Film MenusExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Mapping Menu Chapter Menus I/O SetupInputs Explanation high input causes Relays Explanation closes whenThis page left blank for your notes Full Rack Extender Installation Chapter Options IntroductionOption Card Appendix Material Parameters Source Appendix SpecificationsGeneral Specifications MeasurementDisplay Connector Wiring Relay Pins Input PinsAppendix O Connections Appendix Appendix Handheld Remote Controller Uses the following standards Complies with the Essential Health and Safety RequirementsAppendix EC Declaration of Conformity Declares that the product