Sigma SQC-122c manual Chapter Menus

Page 43

Chapter 3

Menus

A description of each parameter on the Layer Edit Menu follows:

Initial Rate: The beginning rate of deposition for this layer.

Final Thickness: The desired final thickness of this layer. The deposition phase of this layer will end when this thickness is reached.

Time Setpoint: Sets an arbitrary time, after deposition begins, when the time setpoint relay is activated.

Thickness Limit: Sets an arbitrary thickness when the thickness limit relay is activated.

Start Mode: Determines whether a layer begins automatically upon completion of the previous layer. If Manual start is selected, the previous layer ends at its idle power and waits for the user to push the Start button.

Ramp 1: During the deposition of a layer, it may be desirable to change the deposition rate. For example, you may want to deposit slowly at first, then increase the rate once an initial thickness is reached. Enabling rate ramps provides that capability. Once enabled, these parameters are added to the list.

Start Thickness: The deposited thickness at which the new rate will begin.

Ramp Time: Time allowed for the rate to change from initial rate to new rate.

New Rate: The rate of deposition, which is reached at the end of Ramp 1.

Ramp 2: Two rate ramps are available for each layer. The start thickness for Ramp 2 should be greater than the start thickness for Ramp 1.

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Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Symbols Safety InformationLimitation of Warranty Warranty InformationReturn Policy Chapter Options Table of Contents Chapter Quick StartChapter Operation Chapter MenusAppendix Thin Film Process Overview Chapter Quick Start IntroductionChapter Quick Start Front Panel Chapter Quick Start Rear Panel Power Input FuseChapter Quick Start System Connections Chapter Quick Start Installation Select Chapter Quick Start Process SetupPower Quick SetupChapter Quick Start Edit Mode LayerExit to Main Chapter Quick Start Depositing a Film This page left blank for your notes Definitions Chapter Operation IntroductionDefining a Film POWER% POWER% Deposition Controls Menu Layer Edit Menu Chapter Operation Defining a ProcessChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation No Readings, or Erratic Readings from Sensors Chapter Operation TroubleshootingPoor Rate Stability Incorrect Rate or Thickness MeasurementThis page left blank for your notes Chapter Menus Introduction Chapter Menus Main Menu Default, power-up Main Screen display is shown belowFilm SetupNext Menu QuickChapter Menus Next Menu Screens Next Layer Chapter Menus Quick Setup MenuExit to Main Edit Prev LayerChapter Menus Main Screen Prev Menu Select Edit Delete Control Knob Chapter Menus Process MenusInsert Layer Control Knob Main Screen Prev Menu Edit Cut PasteExit to Main Prev Menu Edit Control Knob POWER%Chapter Menus Main Screen Prev Menu Edit Delete Control Knob Chapter Menus Film MenusExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Mapping Menu Chapter Menus I/O SetupInputs Explanation high input causes Relays Explanation closes whenThis page left blank for your notes Chapter Options Introduction Full Rack Extender InstallationOption Card Appendix Material Parameters Source Appendix SpecificationsGeneral Specifications MeasurementDisplay Input Pins Connector Wiring Relay PinsAppendix O Connections Appendix Appendix Handheld Remote Controller Uses the following standards Complies with the Essential Health and Safety RequirementsAppendix EC Declaration of Conformity Declares that the product