Sigma SQC-122c manual Appendix EC Declaration of Conformity, Declares that the product

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Appendix

E.EC Declaration of Conformity

Manufacturer’s Name: Sigma Instruments

Manufacturer’s Address: 1318 Duff Drive

Fort Collins, CO 80524 USA

declares that the product:

Product Name: Deposition Rate Controller

Product Model: SQC-122c

Product Options: All Options

conforms to the following Directives:

73/23/EEC (93/68/EEC)

Low Voltage Directive

89/336/EEC

Electromagnetic Compatibility Directive

uses the following standards:

 

EN 61010-1

Safety of Electrical Equipment for

 

Measurement, Control, and Laboratory Use

EN 50081-2

Generic Standard for Emissions

EN 55011

Radiated and Conducted Emissions (Class A)

EN 50082-2

Generic Standard for Immunity

EN 61000-4-2

Electrostatic Discharge

EN 61000-4-3

Radiated RF Electro-Magnetic Field

EN 61000-4-4

Electrical Fast Transient/Burst

EN 61000-4-6

Conducted RF

ENV 50204

Radiated RF

and complies with the Essential Health and Safety Requirements.

Gary L. Halcomb President

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Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Information Safety SymbolsLimitation of Warranty Warranty InformationReturn Policy Table of Contents Chapter Quick Start Chapter OperationChapter Menus Chapter OptionsAppendix Chapter Quick Start Introduction Thin Film Process OverviewChapter Quick Start Front Panel Power Input Fuse Chapter Quick Start Rear PanelChapter Quick Start System Connections Chapter Quick Start Installation Chapter Quick Start Process Setup PowerQuick Setup SelectChapter Quick Start Edit Mode LayerExit to Main Chapter Quick Start Depositing a Film This page left blank for your notes Definitions Chapter Operation IntroductionDefining a Film POWER% POWER% Deposition Controls Menu Chapter Operation Defining a Process Layer Edit MenuChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation Chapter Operation Troubleshooting No Readings, or Erratic Readings from SensorsIncorrect Rate or Thickness Measurement Poor Rate StabilityThis page left blank for your notes Chapter Menus Introduction Default, power-up Main Screen display is shown below Chapter Menus Main MenuSetup NextMenu Quick FilmChapter Menus Next Menu Screens Chapter Menus Quick Setup Menu Exit to Main EditPrev Layer Next LayerChapter Menus Chapter Menus Process Menus Main Screen Prev Menu Select Edit Delete Control KnobMain Screen Prev Menu Edit Cut Paste Insert Layer Control KnobPOWER% Exit to Main Prev Menu Edit Control KnobChapter Menus Chapter Menus Film Menus Main Screen Prev Menu Edit Delete Control KnobExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Chapter Menus I/O Setup Mapping MenuRelays Explanation closes when Inputs Explanation high input causesThis page left blank for your notes Chapter Options Introduction Full Rack Extender InstallationOption Card Appendix Material Parameters Appendix Specifications General SpecificationsMeasurement SourceDisplay Input Pins Connector Wiring Relay PinsAppendix O Connections Appendix Appendix Handheld Remote Controller Complies with the Essential Health and Safety Requirements Appendix EC Declaration of ConformityDeclares that the product Uses the following standards