Sigma SQC-122c manual Exit to Main Prev Menu Edit Control Knob, Power%

Page 42

Chapter 3

Menus

Each layer consists of a film (i.e. a material), plus the deposition rate and thickness that are desired for this layer. The Layer Edit Menu provides access to these layer parameters:

Exit to Main

Prev Menu

Edit

THICKNESS(kA)

 

RATE(A/s)

POWER(% )

0.000

0.0

0.0

 

My Process 2 -> Layer 2 -> AluminumOxide

 

 

 

 

 

 

 

Parameter

 

Value

Units

 

 

 

 

 

 

 

9.9

A/s

 

Init Rate

 

 

 

 

 

 

Fnl Thk

9.000

kA

 

Time Setpoint

0:00:00

h:mm:ss

 

Thickness Limit

0.000

A

 

Start Mode

 

Manual

Auto/Man .

 

Ramp 1

 

Enabled

En/Dis

 

Start Thkness

4.500

kA

 

Ramp Time

0:10:00

h:mm:ss

 

New Rate

99.0

A/s

 

Ramp 2

 

Disabled

En/Dis

 

 

 

 

 

 

 

 

 

 

 

Exit to Main

Prev Menu

Edit

Control Knob

Edit Layer Menu

Returns to the Main Menu.

Returns to the Layer Select Menu.

Selects the highlighted parameter for edit. SoftKey functions change to:

Next: Store parameter and move to next for editing.

Cancel: Stop editing and undo changes to selected parameter.

Enter: Stop editing and save values for selected parameter.

Control Knob: Turn to adjust value. Push to store value and move to next parameter.

Scrolls through the list of layer parameters.

3-9

Image 42
Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Information Safety SymbolsWarranty Information Limitation of WarrantyReturn Policy Chapter Menus Table of Contents Chapter Quick StartChapter Operation Chapter OptionsAppendix Chapter Quick Start Introduction Thin Film Process OverviewChapter Quick Start Front Panel Power Input Fuse Chapter Quick Start Rear PanelChapter Quick Start System Connections Chapter Quick Start Installation Quick Setup Chapter Quick Start Process SetupPower SelectEdit Mode Layer Chapter Quick StartExit to Main Chapter Quick Start Depositing a Film This page left blank for your notes Chapter Operation Introduction DefinitionsDefining a Film POWER% POWER% Deposition Controls Menu Chapter Operation Defining a Process Layer Edit MenuChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation Chapter Operation Troubleshooting No Readings, or Erratic Readings from SensorsIncorrect Rate or Thickness Measurement Poor Rate StabilityThis page left blank for your notes Chapter Menus Introduction Default, power-up Main Screen display is shown below Chapter Menus Main MenuMenu Quick SetupNext FilmChapter Menus Next Menu Screens Prev Layer Chapter Menus Quick Setup MenuExit to Main Edit Next Layer Chapter Menus Chapter Menus Process Menus Main Screen Prev Menu Select Edit Delete Control KnobMain Screen Prev Menu Edit Cut Paste Insert Layer Control KnobPOWER% Exit to Main Prev Menu Edit Control KnobChapter Menus Chapter Menus Film Menus Main Screen Prev Menu Edit Delete Control KnobExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Chapter Menus I/O Setup Mapping MenuRelays Explanation closes when Inputs Explanation high input causesThis page left blank for your notes Full Rack Extender Installation Chapter Options IntroductionOption Card Appendix Material Parameters Measurement Appendix SpecificationsGeneral Specifications SourceDisplay Connector Wiring Relay Pins Input PinsAppendix O Connections Appendix Appendix Handheld Remote Controller Declares that the product Complies with the Essential Health and Safety RequirementsAppendix EC Declaration of Conformity Uses the following standards