Sigma SQC-122c manual 824 55.3

Page 28

Chapter 2

Operation

Next Menu

Zero

THICKNESS(kA)

RATE(A/s)

P O W E R (% )

0.824

7.8

55.3

 

100.0

 

 

 

 

 

 

 

 

Auto / Manual

Start Nxt

Layer

Restart Layer

Abort

50.0

0.0

0.0

40.0

80.0

1 2 0

160.0

 

 

Rate (A/s vs. Time)

 

 

 

 

 

 

 

 

 

PHASE: Stop Layer

 

 

Process : My Process 1

Run Time : 0:01:45

 

Layer: 1 of 4

 

Final Thick : 1.100

 

Film : Film1

 

Layer Rate : 8.00

 

Layer Stopped

Restart Layer repeats the stopped layer, beginning with preconditioning. Start Nxt Layer skips the remainder of the current layer and immediately starts the next layer.

Note: Pressing the Abort SoftKey at any time completely aborts the process. You can only restart the process at Layer 1!

Spend some time in Simulate mode verifying that the process sequences through each phase of each layer as expected. If not, use the Quick Setup, Process, and Film menus to make corrections.

Because the process is being “simulated,” some parameters will not be correct for your process (particularly, PID). However, you can become familiar with the effect of each parameter in this simulated process. Also practice using the Next Menu options, especially Auto/Manual modes.

Once you have verified the process in Simulate Mode, you may return to the System Params menu and turn Simulate OFF to start testing your process. Use the next section to finalize the loop PID settings.

2-14

Image 28
Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Information Safety SymbolsLimitation of Warranty Warranty InformationReturn Policy Table of Contents Chapter Quick Start Chapter OperationChapter Menus Chapter OptionsAppendix Chapter Quick Start Introduction Thin Film Process OverviewChapter Quick Start Front Panel Power Input Fuse Chapter Quick Start Rear PanelChapter Quick Start System Connections Chapter Quick Start Installation Chapter Quick Start Process Setup PowerQuick Setup SelectChapter Quick Start Edit Mode LayerExit to Main Chapter Quick Start Depositing a Film This page left blank for your notes Definitions Chapter Operation IntroductionDefining a Film POWER% POWER% Deposition Controls Menu Chapter Operation Defining a Process Layer Edit MenuChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation Chapter Operation Troubleshooting No Readings, or Erratic Readings from SensorsIncorrect Rate or Thickness Measurement Poor Rate StabilityThis page left blank for your notes Chapter Menus Introduction Default, power-up Main Screen display is shown below Chapter Menus Main MenuSetup NextMenu Quick FilmChapter Menus Next Menu Screens Chapter Menus Quick Setup Menu Exit to Main EditPrev Layer Next LayerChapter Menus Chapter Menus Process Menus Main Screen Prev Menu Select Edit Delete Control KnobMain Screen Prev Menu Edit Cut Paste Insert Layer Control KnobPOWER% Exit to Main Prev Menu Edit Control KnobChapter Menus Chapter Menus Film Menus Main Screen Prev Menu Edit Delete Control KnobExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Chapter Menus I/O Setup Mapping MenuRelays Explanation closes when Inputs Explanation high input causesThis page left blank for your notes Chapter Options Introduction Full Rack Extender InstallationOption Card Appendix Material Parameters Appendix Specifications General SpecificationsMeasurement SourceDisplay Input Pins Connector Wiring Relay PinsAppendix O Connections Appendix Appendix Handheld Remote Controller Complies with the Essential Health and Safety Requirements Appendix EC Declaration of ConformityDeclares that the product Uses the following standards