Sigma SQC-122c manual Chapter Quick Start, Edit Mode Layer, Exit to Main

Page 12

Chapter 1

Quick Start

Edit Mode

Edit

Layer 1

To edit a setting in any menu, turn the control knob to scroll to the desired setting, then press the Edit SoftKey.

In Edit mode, the cursor moves to the setting value and the SoftKey functions change to show:

Next: Store the parameter and move to next parameter for editing.

Cancel: Stop editing and return the selected parameter to its previous value.

Enter: Stop editing and save values for selected parameter.

In Edit mode, adjust the control knob to set the desired parameter value.

Spend some time navigating through the Quick Setup parameters and editing values. When you are comfortable, be sure your values for Layer 1 match those shown below.

Exit to Main

Edit

Next Layer

THICKNESS(kA)

 

RATE(A/s)

POWER( % )

0.000

0.0

0.0

 

My Process 1 -> Layer 1 ->

 

 

Parameter

 

Value

Units

 

 

 

 

 

 

Init Rate

11.1

A/s

 

 

Fnl Thk

0.101

kA

 

P Term

50

None

 

I Term

0.7

Sec.

 

D Term

0.0

Sec.

 

Sensor 1

 

O n

On/Off

 

Sensor 2

 

O n

On/Off

 

Output

 

Out1

Out1/Out2

 

Max. Power

76.0

%

 

Slew Rate

10.0

%

 

Material

 

Copper

 

 

 

 

 

 

 

 

 

 

Quick Setup Menu

Exit to Main

Press Exit to Main to return to the main screen.

1-7

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Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Information Safety SymbolsWarranty Information Limitation of WarrantyReturn Policy Table of Contents Chapter Quick Start Chapter OperationChapter Menus Chapter OptionsAppendix Chapter Quick Start Introduction Thin Film Process OverviewChapter Quick Start Front Panel Power Input Fuse Chapter Quick Start Rear PanelChapter Quick Start System Connections Chapter Quick Start Installation Chapter Quick Start Process Setup PowerQuick Setup SelectEdit Mode Layer Chapter Quick StartExit to Main Chapter Quick Start Depositing a Film This page left blank for your notes Chapter Operation Introduction DefinitionsDefining a Film POWER% POWER% Deposition Controls Menu Chapter Operation Defining a Process Layer Edit MenuChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation Chapter Operation Troubleshooting No Readings, or Erratic Readings from SensorsIncorrect Rate or Thickness Measurement Poor Rate StabilityThis page left blank for your notes Chapter Menus Introduction Default, power-up Main Screen display is shown below Chapter Menus Main MenuSetup NextMenu Quick FilmChapter Menus Next Menu Screens Chapter Menus Quick Setup Menu Exit to Main EditPrev Layer Next LayerChapter Menus Chapter Menus Process Menus Main Screen Prev Menu Select Edit Delete Control KnobMain Screen Prev Menu Edit Cut Paste Insert Layer Control KnobPOWER% Exit to Main Prev Menu Edit Control KnobChapter Menus Chapter Menus Film Menus Main Screen Prev Menu Edit Delete Control KnobExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Chapter Menus I/O Setup Mapping MenuRelays Explanation closes when Inputs Explanation high input causesThis page left blank for your notes Full Rack Extender Installation Chapter Options IntroductionOption Card Appendix Material Parameters Appendix Specifications General SpecificationsMeasurement SourceDisplay Connector Wiring Relay Pins Input PinsAppendix O Connections Appendix Appendix Handheld Remote Controller Complies with the Essential Health and Safety Requirements Appendix EC Declaration of ConformityDeclares that the product Uses the following standards