Sigma SQC-122c manual Table of Contents Chapter Quick Start, Chapter Operation, Chapter Menus

Table of Contents
Chapter 1		Quick Start
1.0	Introduction		1-1
1.1	Thin Film Process Overview		1-1
1.2	System Connections		1-2
1.3	Front Panel		1-3
1.4	Rear Panel		1-4
1.5	Installation		1-5
1.6	Process Setup		1-6
1.7	Depositing a Film		1-8

Chapter 2		Operation
2.0	Introduction		2-1
2.1	Definitions		2-1
2.2	Defining a Film		2-1
2.3	Defining a Process		2-5
2.4	Sensor Setup		2-7
2.5	Source Setup		2-10
2.6	Running a Process		2-11
2.7	Loop Tuning		2-15
2.8	Troubleshooting		2-17

Chapter 3		Menus
3.0	Introduction		3-1
3.1	Main Menu		3-2
3.2	Next Menus		3-4
3.3	Quick Setup Menu		3-5
3.4	Process Menus		3-7
3.5	Film Menus		3-11
3.6	System Parameters Menu		3-18
3.7	I/O Setup		3-21
Chapter 4		Options

4.0	Introduction	4-1
4.1	Options Cards	4-1
4.2	Full Rack Extender Installation	4-1