Sigma SQC-122c manual Deposition Controls Menu

Page 47

Chapter 3

Menus

The Deposit Controls SoftKey displays these additional film settings: (Refer to section 2.2 for deposition control definitions.)

Exit to Main

Prev Menu

Edit

THICKNESS(kA)

 

RATE(A/s)

POWER(%)

0.000

0.0

 

0.0

 

Current: Process 1

 

EDITING: Film 1

 

 

 

 

 

 

Parameter

 

Value

 

Units

 

 

 

 

 

 

 

 

 

 

 

 

 

Shutter Delay

0:01:00

 

h:mm:ss

 

 

 

 

 

 

 

 

Capture

20.0

 

%

 

Control Error

 

(Ignore, Stop, Hold)

 

 

Setting

 

Hold

 

 

Error

18.0

 

%

 

Rate Sampling

 

(Cont,Time,Acc based)

 

 

Setting

 

Undefined

 

 

Accuracy Based

0.0

 

%

 

 

 

 

 

 

 

 

 

 

 

 

 

Exit to Main

Prev Menu

Edit

Deposition Controls Menu

Returns to the Main Menu.

Returns to the Film Edit Menu.

Selects the highlighted parameter for edit. SoftKey functions change to:

Next: Store parameter and move to next for editing.

Cancel: Stop editing and undo changes to selected parameter.

Enter: Stop editing and save values for selected parameter.

Control Knob: Turn to adjust value. Push to store value and move to next parameter.

Control Knob Scrolls through the list of deposition control parameters.

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Image 47
Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Symbols Safety InformationReturn Policy Warranty InformationLimitation of Warranty Chapter Options Table of Contents Chapter Quick StartChapter Operation Chapter MenusAppendix Thin Film Process Overview Chapter Quick Start IntroductionChapter Quick Start Front Panel Chapter Quick Start Rear Panel Power Input FuseChapter Quick Start System Connections Chapter Quick Start Installation Select Chapter Quick Start Process SetupPower Quick SetupExit to Main Edit Mode LayerChapter Quick Start Chapter Quick Start Depositing a Film This page left blank for your notes Defining a Film Chapter Operation IntroductionDefinitions POWER% POWER% Deposition Controls Menu Layer Edit Menu Chapter Operation Defining a ProcessChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation No Readings, or Erratic Readings from Sensors Chapter Operation TroubleshootingPoor Rate Stability Incorrect Rate or Thickness MeasurementThis page left blank for your notes Chapter Menus Introduction Chapter Menus Main Menu Default, power-up Main Screen display is shown belowFilm SetupNext Menu QuickChapter Menus Next Menu Screens Next Layer Chapter Menus Quick Setup MenuExit to Main Edit Prev LayerChapter Menus Main Screen Prev Menu Select Edit Delete Control Knob Chapter Menus Process MenusInsert Layer Control Knob Main Screen Prev Menu Edit Cut PasteExit to Main Prev Menu Edit Control Knob POWER%Chapter Menus Main Screen Prev Menu Edit Delete Control Knob Chapter Menus Film MenusExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Mapping Menu Chapter Menus I/O SetupInputs Explanation high input causes Relays Explanation closes whenThis page left blank for your notes Option Card Full Rack Extender InstallationChapter Options Introduction Appendix Material Parameters Source Appendix SpecificationsGeneral Specifications MeasurementDisplay Appendix O Connections Connector Wiring Relay PinsInput Pins Appendix Appendix Handheld Remote Controller Uses the following standards Complies with the Essential Health and Safety RequirementsAppendix EC Declaration of Conformity Declares that the product