Sigma SQC-122c manual Next Menu Zero THICKNESSkA RATEA/s

Page 27

Chapter 2

Operation

Enough preliminaries, let’s start the process!

Press Start from any of the main screen menus to start deposition. If the first layer Start mode was programmed as Manual, you will need to press the Start Layer SoftKey now to start the layer.

Note: Don’t confuse Manual and Auto Start mode with the Manual/Auto SoftKey. Manual Start is a Process setup parameter that tells the SQC-122c to wait for operator intervention before starting a Layer.

Next Menu

Zero

THICKNESS(kA)

RATE(A/s)

P O W E R (% )

0.057

0.3

45.0

 

100.0

 

 

 

 

 

 

 

 

Auto / Manual

Stop

Layer

Abort

50.0

0.0

0.0

12.5

25.0

37.5

50.0

 

 

Power (% vs. Time)

 

 

 

 

 

 

 

 

 

PHASE: Soak 2

 

 

Process : My Process 1

Run Time : 0:00:45

 

Layer: 1 of 4

 

Final Thick : 1.100

 

Film : Film1

 

Layer Rate : 8.00

 

Preconditioning

When Start is pushed, the process starts with the first layer preconditioning phase. When preconditioning is complete, the deposition phase begins. The deposition phase ends when Final Thickness is reached for the layer, then Feed and Idle phases run (if programmed).

If the second layer is Auto Start, its cycle begins immediately when the first layer is complete. If the second Layer is Manual Start, or it’s the last layer in the process, the process halts and waits for operator intervention.

While the process is running, a Stop Layer SoftKey is shown (see above). Pressing Stop Layer temporarily halts the current layer and displays two restart options, Start Nxt Layer and Restart Layer.

2-13

Image 27
Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Symbols Safety InformationWarranty Information Limitation of WarrantyReturn Policy Chapter Options Table of Contents Chapter Quick StartChapter Operation Chapter MenusAppendix Thin Film Process Overview Chapter Quick Start IntroductionChapter Quick Start Front Panel Chapter Quick Start Rear Panel Power Input FuseChapter Quick Start System Connections Chapter Quick Start Installation Select Chapter Quick Start Process SetupPower Quick SetupEdit Mode Layer Chapter Quick StartExit to Main Chapter Quick Start Depositing a Film This page left blank for your notes Chapter Operation Introduction DefinitionsDefining a Film POWER% POWER% Deposition Controls Menu Layer Edit Menu Chapter Operation Defining a ProcessChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation No Readings, or Erratic Readings from Sensors Chapter Operation TroubleshootingPoor Rate Stability Incorrect Rate or Thickness MeasurementThis page left blank for your notes Chapter Menus Introduction Chapter Menus Main Menu Default, power-up Main Screen display is shown belowFilm SetupNext Menu QuickChapter Menus Next Menu Screens Next Layer Chapter Menus Quick Setup MenuExit to Main Edit Prev LayerChapter Menus Main Screen Prev Menu Select Edit Delete Control Knob Chapter Menus Process MenusInsert Layer Control Knob Main Screen Prev Menu Edit Cut PasteExit to Main Prev Menu Edit Control Knob POWER%Chapter Menus Main Screen Prev Menu Edit Delete Control Knob Chapter Menus Film MenusExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Mapping Menu Chapter Menus I/O SetupInputs Explanation high input causes Relays Explanation closes whenThis page left blank for your notes Full Rack Extender Installation Chapter Options IntroductionOption Card Appendix Material Parameters Source Appendix SpecificationsGeneral Specifications MeasurementDisplay Connector Wiring Relay Pins Input PinsAppendix O Connections Appendix Appendix Handheld Remote Controller Uses the following standards Complies with the Essential Health and Safety RequirementsAppendix EC Declaration of Conformity Declares that the product