Sigma SQC-122c manual Chapter Menus

Page 52

Chapter 3

Menus

Descriptions of each System Parameter follows:

Period: Sets the measurement period between .1 second (10 readings per second) and 1 second. A longer period gives higher reading accuracy, especially in low rate and low density applications.

Period

Frequency

(seconds)

Resolution (Hz)

.1

.3

.25

.12

.5

.06

.75

.04

1

.03

System Tooling: Adjusts for overall sensor deposition rates that differ from the measured substrate deposition rate.

Xtal Tool 1-2:Adjusts for sensor deposition rates that differ from the measured substrate deposition rate, because of sensor location. If the rate/thickness reading is low, then increase the tooling value. If the rate/thickness reading is high, then lower the tooling value

Simulate Mode: Normal mode uses the quartz crystals as inputs to the SQC-122c for PID calculations and source output control. Simulate mode simulates the quartz crystals based on the crystal frequencies set on this. Simulate mode is useful for debugging process recipes.

Min/Max Frequency: The frequency values for the quartz crystal sensors used as inputs to the SQC-122c. The maximum frequency should be set to the frequency of a new crystal, typically 6MHz. Sensor readings outside the min/max values cause an error.

Scale 1 -2:The input voltage required by the deposition source power supply to produce 100% output power. Positive or negative Scale 1,2 values are possible.

Pocket Relay: Select Single to assign a single relay to each source pocket. Select Multi to allow relays to represent the BCD encoded value of the selected pocket.

For example, assume that a film has its Pocket parameter set to 3. In I/O Setup, set Relay 1, 2, & 3 to Pocket 1, 2, & 3. Then if this parameter is set to Single, Relay 3 will close when deposition begins. If this parameter is set to Multi then Relays 1 & 2 will close (representing a binary 3).

Dev Graph Limit: Sets the upper limit for the Rate Deviation graph Y axis.

3-19

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Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Information Safety SymbolsLimitation of Warranty Warranty InformationReturn Policy Table of Contents Chapter Quick Start Chapter OperationChapter Menus Chapter OptionsAppendix Chapter Quick Start Introduction Thin Film Process OverviewChapter Quick Start Front Panel Power Input Fuse Chapter Quick Start Rear PanelChapter Quick Start System Connections Chapter Quick Start Installation Chapter Quick Start Process Setup PowerQuick Setup SelectChapter Quick Start Edit Mode LayerExit to Main Chapter Quick Start Depositing a Film This page left blank for your notes Definitions Chapter Operation IntroductionDefining a Film POWER% POWER% Deposition Controls Menu Chapter Operation Defining a Process Layer Edit MenuChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation Chapter Operation Troubleshooting No Readings, or Erratic Readings from SensorsIncorrect Rate or Thickness Measurement Poor Rate StabilityThis page left blank for your notes Chapter Menus Introduction Default, power-up Main Screen display is shown below Chapter Menus Main MenuSetup NextMenu Quick FilmChapter Menus Next Menu Screens Chapter Menus Quick Setup Menu Exit to Main EditPrev Layer Next LayerChapter Menus Chapter Menus Process Menus Main Screen Prev Menu Select Edit Delete Control KnobMain Screen Prev Menu Edit Cut Paste Insert Layer Control KnobPOWER% Exit to Main Prev Menu Edit Control KnobChapter Menus Chapter Menus Film Menus Main Screen Prev Menu Edit Delete Control KnobExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Chapter Menus I/O Setup Mapping MenuRelays Explanation closes when Inputs Explanation high input causesThis page left blank for your notes Chapter Options Introduction Full Rack Extender InstallationOption Card Appendix Material Parameters Appendix Specifications General SpecificationsMeasurement SourceDisplay Input Pins Connector Wiring Relay PinsAppendix O Connections Appendix Appendix Handheld Remote Controller Complies with the Essential Health and Safety Requirements Appendix EC Declaration of ConformityDeclares that the product Uses the following standards