Sigma SQC-122c Appendix Specifications, Measurement, Source, Digital I/ O, General Specifications

Page 59

Appendix

B.Specifications

Measurement

 

Number of Sensors

2

Frequency Range

4.0 MHz to 6.0 MHz

Frequency Accuracy

.01% @ 2 readings/sec.

Frequency Resolution

.06 Hz @ 2 readings/sec

Rate Accuracy

.5% typical

Rate Resolution

.01/.1 ?/s

Thickness Accuracy

.5% typical

Thickness Resolution

1 ?

Measurement Period

.1 to 1 sec.

Source

 

Number of Sources

Control Voltage

Resolution

Digital I/ O

2

0 to ±10V into 2k? load

15 bits

Digital Inputs

8

Functions

User Programmed (See Chapter 3)

Input Rating

5VDC, non-isolated

Relay Outputs

8

Functions

User Programmed (See Chapter 3)

Relay Rating

30Vrms or 30VDC, 2A maximum

General Specifications

 

Mains Power Supply

100-120/200-240~, ±10% nominal

 

50/60 Hz

Power Consumption

25W

Operating & Transportation

0?C to 50?C

Environment

0 to 80% RH non-condensing

 

0 to 2,000 meters

 

Indoor Use Only

 

Class 1 Equipment (Grounded Type)

 

Suitable for Continuous Operation

 

Ordinary Protection (not protected

 

? against harmful ingress of moisture)

 

Pollution Degree II

 

Installation (Overvoltage) Category II

Storage Environment

? for transient overvoltages

- 40?C to 70?C

Rack Dimensions (HxWxD)

5.23 in. x 8.4 in. x 10.0 in.

Weight

132.8mm x 213.4m x 254.0mm

4 pounds (1.8 kg)

 

 

Image 59
Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Symbols Safety InformationReturn Policy Warranty InformationLimitation of Warranty Chapter Options Table of Contents Chapter Quick StartChapter Operation Chapter MenusAppendix Thin Film Process Overview Chapter Quick Start IntroductionChapter Quick Start Front Panel Chapter Quick Start Rear Panel Power Input FuseChapter Quick Start System Connections Chapter Quick Start Installation Select Chapter Quick Start Process SetupPower Quick SetupExit to Main Edit Mode LayerChapter Quick Start Chapter Quick Start Depositing a Film This page left blank for your notes Defining a Film Chapter Operation IntroductionDefinitions POWER% POWER% Deposition Controls Menu Layer Edit Menu Chapter Operation Defining a ProcessChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation No Readings, or Erratic Readings from Sensors Chapter Operation TroubleshootingPoor Rate Stability Incorrect Rate or Thickness MeasurementThis page left blank for your notes Chapter Menus Introduction Chapter Menus Main Menu Default, power-up Main Screen display is shown belowFilm SetupNext Menu QuickChapter Menus Next Menu Screens Next Layer Chapter Menus Quick Setup MenuExit to Main Edit Prev LayerChapter Menus Main Screen Prev Menu Select Edit Delete Control Knob Chapter Menus Process MenusInsert Layer Control Knob Main Screen Prev Menu Edit Cut PasteExit to Main Prev Menu Edit Control Knob POWER%Chapter Menus Main Screen Prev Menu Edit Delete Control Knob Chapter Menus Film MenusExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Mapping Menu Chapter Menus I/O SetupInputs Explanation high input causes Relays Explanation closes whenThis page left blank for your notes Option Card Full Rack Extender InstallationChapter Options Introduction Appendix Material Parameters Source Appendix SpecificationsGeneral Specifications MeasurementDisplay Appendix O Connections Connector Wiring Relay PinsInput Pins Appendix Appendix Handheld Remote Controller Uses the following standards Complies with the Essential Health and Safety RequirementsAppendix EC Declaration of Conformity Declares that the product