Sigma SQC-122c manual Chapter Quick Start Depositing a Film

Page 13

Chapter 1

Quick Start

1.7Depositing a Film

If you have followed this Quick Start chapter, you are ready to deposit a film.

Note: You can simulate the steps below, without actually depositing a film, by going to the System Parameters Menu and selecting Simulate Mode ON. Simulate mode is useful for testing processes before applying power to the evaporation supply. See Section 3.6 for System Parameters Menu information.

Verify Output

From the Main Menu, press the Next Menu SoftKey. Then,

Operation

press Auto/Manual to display Manual/Auto. Slowly turn the

 

control knob to increase the control voltage to your evaporation

 

supply. Verify that the Power(%) reading in the display upper

 

right-hand corner approximates the actual output of your

 

evaporation supply. If not, check your hookup (1.5), and refer

 

to Scale Voltage (3.6).

Verify Sensor

Press Next Menu until the Switch Displays option is shown.

Operation

Press Switch Displays to display Sensor 1 and Sensor 2 in

 

the lower status section of the screen. At least one sensor

 

should be ON and display a % life of over 50%. If not, check

 

your sensor connections (1.5), and refer to Min/Max Frequency

 

(3.6).

Enter

Press the Next Menu key twice to display the output screen.

Auto Mode

Press Manual/Auto until Auto/Manual is displayed.

Show

Press Next Menu once more. Press the Next Graph SoftKey

Power Graph

until the graph shows Power (% vs. Time).

Start

Press the Start key to start the deposition process. Graphing

Process

of the output power should start.

 

Caution: Observe the output power versus your evaporation

 

supply’s actual output. If there is a problem, press the Stop

 

SoftKey immediately.

If the rate and thickness readings do not match your expectations, refer to Appendix A for information on Density and Z-Factor, and Section 2.4 for Tooling.

Please take time to review the remainder of this manual for detailed operational, programming, and safety information.

1-8

Image 13
Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Symbols Safety InformationLimitation of Warranty Warranty InformationReturn Policy Chapter Operation Table of Contents Chapter Quick StartChapter Menus Chapter OptionsAppendix Thin Film Process Overview Chapter Quick Start IntroductionChapter Quick Start Front Panel Chapter Quick Start Rear Panel Power Input FuseChapter Quick Start System Connections Chapter Quick Start Installation Power Chapter Quick Start Process SetupQuick Setup SelectChapter Quick Start Edit Mode LayerExit to Main Chapter Quick Start Depositing a Film This page left blank for your notes Definitions Chapter Operation IntroductionDefining a Film POWER% POWER% Deposition Controls Menu Layer Edit Menu Chapter Operation Defining a ProcessChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation No Readings, or Erratic Readings from Sensors Chapter Operation TroubleshootingPoor Rate Stability Incorrect Rate or Thickness MeasurementThis page left blank for your notes Chapter Menus Introduction Chapter Menus Main Menu Default, power-up Main Screen display is shown belowNext SetupMenu Quick FilmChapter Menus Next Menu Screens Exit to Main Edit Chapter Menus Quick Setup MenuPrev Layer Next LayerChapter Menus Main Screen Prev Menu Select Edit Delete Control Knob Chapter Menus Process MenusInsert Layer Control Knob Main Screen Prev Menu Edit Cut PasteExit to Main Prev Menu Edit Control Knob POWER%Chapter Menus Main Screen Prev Menu Edit Delete Control Knob Chapter Menus Film MenusExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Mapping Menu Chapter Menus I/O SetupInputs Explanation high input causes Relays Explanation closes whenThis page left blank for your notes Chapter Options Introduction Full Rack Extender InstallationOption Card Appendix Material Parameters General Specifications Appendix SpecificationsMeasurement SourceDisplay Input Pins Connector Wiring Relay PinsAppendix O Connections Appendix Appendix Handheld Remote Controller Appendix EC Declaration of Conformity Complies with the Essential Health and Safety RequirementsDeclares that the product Uses the following standards