Sigma SQC-122c manual Chapter Quick Start Process Setup, Power, Select, Quick Setup

Page 11

Chapter 1

Quick Start

1.6Process Setup

Follow these steps to build a process from the main (also called “power up”) screen.

Note: If you are prompted for a password, use the switches along the left of the screen to enter the password. The top switch is “1”, the bottom switch is “6”. If you forget the password, see the System Parameters section for password setup.

Power

Move the rear panel power switch to the On () position. The

On

SQC-122c will briefly display its initialization information, then

 

go to normal operating mode.

Select

Press the Quick Setup SoftKey to view the quick setup

Quick Setup

parameters for the current process.

 

If no Quick Setup option is visible, no processes are defined in

 

the SQC-122c. In that case, press Film Menu, then scroll the

 

cursor until an <Empty> film is selected. Press Create to

 

create a new film, then press Main Screen. Now press

 

Process Menu, then Create, then Edit. Select Insert Layer,

 

scroll to your new film and press Enter. Now press Prev Menu

 

twice to return to the Main Menu.

Next Menu

Quick Setup

THICKNESS(kA)

RATE(A/s)

P O W E R (% )

0.000

0.0

0.0

 

100.0

 

 

 

 

 

 

 

 

Process

Menu

Film

Menu

System Params

Start

50.0

0.0

0.0

12.5

25.0

37.5

50.0

 

 

Power (% vs. Time)

 

 

 

 

 

 

 

 

 

PHASE: Stopped

 

 

Process : My Process 1

Run Time : 0:00:00

 

Layer: 1 of 1

 

Final Thick : 0.1011

 

Film : Aluminum

 

Layer Rate : 11.1

 

Main Screen

1-6

Image 11
Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Symbols Safety InformationReturn Policy Warranty InformationLimitation of Warranty Chapter Options Table of Contents Chapter Quick StartChapter Operation Chapter MenusAppendix Thin Film Process Overview Chapter Quick Start IntroductionChapter Quick Start Front Panel Chapter Quick Start Rear Panel Power Input FuseChapter Quick Start System Connections Chapter Quick Start Installation Select Chapter Quick Start Process SetupPower Quick SetupExit to Main Edit Mode LayerChapter Quick Start Chapter Quick Start Depositing a Film This page left blank for your notes Defining a Film Chapter Operation IntroductionDefinitions POWER% POWER% Deposition Controls Menu Layer Edit Menu Chapter Operation Defining a ProcessChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation No Readings, or Erratic Readings from Sensors Chapter Operation TroubleshootingPoor Rate Stability Incorrect Rate or Thickness MeasurementThis page left blank for your notes Chapter Menus Introduction Chapter Menus Main Menu Default, power-up Main Screen display is shown belowFilm SetupNext Menu QuickChapter Menus Next Menu Screens Next Layer Chapter Menus Quick Setup MenuExit to Main Edit Prev LayerChapter Menus Main Screen Prev Menu Select Edit Delete Control Knob Chapter Menus Process MenusInsert Layer Control Knob Main Screen Prev Menu Edit Cut PasteExit to Main Prev Menu Edit Control Knob POWER%Chapter Menus Main Screen Prev Menu Edit Delete Control Knob Chapter Menus Film MenusExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Mapping Menu Chapter Menus I/O SetupInputs Explanation high input causes Relays Explanation closes whenThis page left blank for your notes Option Card Full Rack Extender InstallationChapter Options Introduction Appendix Material Parameters Source Appendix SpecificationsGeneral Specifications MeasurementDisplay Appendix O Connections Connector Wiring Relay PinsInput Pins Appendix Appendix Handheld Remote Controller Uses the following standards Complies with the Essential Health and Safety RequirementsAppendix EC Declaration of Conformity Declares that the product