Sigma SQC-122c manual Chapter Operation Source Setup

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Chapter 2

Operation

2.5Source Setup

The SQC-122c controls deposition rate by varying the control voltage to an external evaporation (source) supply. The previous illustration for sensor wiring also shows source supply wiring.

The SQC-122c control voltage output range is set in the Systems Params menu. For the supply connected to Output 1, set Scale 1 to the control voltage that corresponds to 100% output on the source supply. The SQC-122c uses 0 volts as 0% output, and the programmed value as 100% output. Scale values from –10 volts to 10 volts are possible.

If you find that very small changes in control voltage yield large changes in deposition rate, you can lower the Scale value to decrease the dynamic range. Also, each Film has a Max Power and Slew Rate parameter that may be used to customize response to that film.

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Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Information Safety SymbolsWarranty Information Limitation of WarrantyReturn Policy Table of Contents Chapter Quick Start Chapter OperationChapter Menus Chapter OptionsAppendix Chapter Quick Start Introduction Thin Film Process OverviewChapter Quick Start Front Panel Power Input Fuse Chapter Quick Start Rear PanelChapter Quick Start System Connections Chapter Quick Start Installation Chapter Quick Start Process Setup PowerQuick Setup SelectEdit Mode Layer Chapter Quick StartExit to Main Chapter Quick Start Depositing a Film This page left blank for your notes Chapter Operation Introduction DefinitionsDefining a Film POWER% POWER% Deposition Controls Menu Chapter Operation Defining a Process Layer Edit MenuChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation Chapter Operation Troubleshooting No Readings, or Erratic Readings from SensorsIncorrect Rate or Thickness Measurement Poor Rate StabilityThis page left blank for your notes Chapter Menus Introduction Default, power-up Main Screen display is shown below Chapter Menus Main MenuSetup NextMenu Quick FilmChapter Menus Next Menu Screens Chapter Menus Quick Setup Menu Exit to Main EditPrev Layer Next LayerChapter Menus Chapter Menus Process Menus Main Screen Prev Menu Select Edit Delete Control KnobMain Screen Prev Menu Edit Cut Paste Insert Layer Control KnobPOWER% Exit to Main Prev Menu Edit Control KnobChapter Menus Chapter Menus Film Menus Main Screen Prev Menu Edit Delete Control KnobExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Chapter Menus I/O Setup Mapping MenuRelays Explanation closes when Inputs Explanation high input causesThis page left blank for your notes Full Rack Extender Installation Chapter Options IntroductionOption Card Appendix Material Parameters Appendix Specifications General SpecificationsMeasurement SourceDisplay Connector Wiring Relay Pins Input PinsAppendix O Connections Appendix Appendix Handheld Remote Controller Complies with the Essential Health and Safety Requirements Appendix EC Declaration of ConformityDeclares that the product Uses the following standards