Sigma SQC-122c manual Main Screen Prev Menu Edit Cut Paste, Insert Layer Control Knob

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Chapter 3

Menus

The second Process Menu shows the sequence of layers that will be deposited in the current process.

Main

Screen

Prev Menu

Edit

Cut / Paste

Insert Layer

THICKNESS(kA)

RATE(A/s)

POWER(%)

0.000

0.0

0.0

 

 

My Process 2 -> Layer 2 -> Aluminum

 

 

 

 

 

 

 

 

 

Layer

 

Film

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Layer 1

 

Aluminum

 

 

 

 

 

 

 

 

 

 

 

Layer 2

 

AluminumOxide

 

 

 

 

 

 

 

 

 

 

 

 

 

Layer Select Menu

Main Screen

Prev

Menu

Edit

Cut /

Paste

Returns to the Main Menu.

Returns to the Process Select Menu.

Displays the Layer Edit Menu for the highlighted layer (see next page).

Used to develop the sequence of layers in a process. The highlighted layer may be Cut (removed from the process) or Copied to the clipboard. The layer on the clipboard can then be Pasted anywhere in the list of layers.

Insert

Layer

Control Knob

Shows the list of 25 films. Select a film, then press Enter to insert the film as a new layer.

Scrolls through the list of layers in the Layer Select Menu, and through the list of films in the Insert Layer mode. When pressed, begins editing of the highlighted layer.

3-8

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Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Symbols Safety InformationReturn Policy Warranty InformationLimitation of Warranty Chapter Operation Table of Contents Chapter Quick StartChapter Menus Chapter OptionsAppendix Thin Film Process Overview Chapter Quick Start IntroductionChapter Quick Start Front Panel Chapter Quick Start Rear Panel Power Input FuseChapter Quick Start System Connections Chapter Quick Start Installation Power Chapter Quick Start Process SetupQuick Setup SelectExit to Main Edit Mode LayerChapter Quick Start Chapter Quick Start Depositing a Film This page left blank for your notes Defining a Film Chapter Operation IntroductionDefinitions POWER% POWER% Deposition Controls Menu Layer Edit Menu Chapter Operation Defining a ProcessChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation No Readings, or Erratic Readings from Sensors Chapter Operation TroubleshootingPoor Rate Stability Incorrect Rate or Thickness MeasurementThis page left blank for your notes Chapter Menus Introduction Chapter Menus Main Menu Default, power-up Main Screen display is shown belowNext SetupMenu Quick FilmChapter Menus Next Menu Screens Exit to Main Edit Chapter Menus Quick Setup MenuPrev Layer Next LayerChapter Menus Main Screen Prev Menu Select Edit Delete Control Knob Chapter Menus Process MenusInsert Layer Control Knob Main Screen Prev Menu Edit Cut PasteExit to Main Prev Menu Edit Control Knob POWER%Chapter Menus Main Screen Prev Menu Edit Delete Control Knob Chapter Menus Film MenusExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Mapping Menu Chapter Menus I/O SetupInputs Explanation high input causes Relays Explanation closes whenThis page left blank for your notes Option Card Full Rack Extender InstallationChapter Options Introduction Appendix Material Parameters General Specifications Appendix SpecificationsMeasurement SourceDisplay Appendix O Connections Connector Wiring Relay PinsInput Pins Appendix Appendix Handheld Remote Controller Appendix EC Declaration of Conformity Complies with the Essential Health and Safety RequirementsDeclares that the product Uses the following standards