Sigma SQC-122c manual Chapter Operation Defining a Process, Layer Edit Menu

Chapter 2 Operation

2.3Defining a Process

A process is a sequence of film layers deposited to achieve a particular thin film characteristic. A few processes, each consisting of a few layers, may be adequate for a production facility. For research or laboratory use, the SQC-122c can store up to 25 processes to a total of 250 layers.

You should define each of the films that will make up the layers of the process before starting process definition. See the previous section for instructions on defining films.

To define a process, select Process Menu on the main screen. A list of 25 processes (or <Empty>) will be displayed. To define a new process, scroll to <Empty> and press Create. A new Process# is added to the list of existing processes (use the SQC-122c setup software to assign descriptive process names). Press Select, then Edit to display the sequence of layers and films that comprise the selected process.

To add a layer, scroll to the desired location in the layer sequence, and press Insert Layer. Select a film for this layer from the list and press Enter. Once a film is assigned to a process layer, you cannot change the film. Instead, cut the layer, then insert a new layer and select the desired film. To edit a layer, highlight it, then press Edit.

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THICKNESS(kA)			RATE(A/s)	POWER(%)
0.000		0.0		0.0
My Process 1	Layer 1 ->
Parameter			Value	Units
Init. Rate		5.0		A/s
		0.500
Fnl Thk				kA
Time Setpoint		0:01:00		h:mm:ss
Thickness Limit		0.400		kA
Start Mode			Auto	Man/Auto
Ramp1			Enabled	En/Dis
Start Thickness		0.150		kA
Ramp Time		0:00:30		h:mm:ss
New Rate		3.5		A/s
Ramp2			Disabled	En/Dis

Layer Edit Menu

Remember that most setup parameters are set in the Films Menu, and apply to every instance where the film is used. The layer parameters pertain only to this instance of the film, in this process.

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