Sigma SQC-122c manual Deposition Controls Menu

Chapter 2 Operation

From the Film Conds menu, press Prev Menu to return to the main Film Params menu. Now press Deposit Controls. The Deposit Controls menu contains parameters that modify operation during the deposition phase.

Exit to Main

Prev Menu

Edit

THICKNESS(kA)		RATE(A/s)		POWER(%)
0.000	0.0		0.0
Current: Process 1		EDITING:	Film 1
Parameter		Value		Units
				h:mm:ss
Shutter Delay	0:01:00
Capture	20.0		%
Control Error		(Ignore, Stop, Hold)
Setting		Hold
Error	18.0		%
Rate Sampling		(Cont,Time,Acc based)
Setting		Undefined
Accuracy Based	0.0		%

Deposition Controls Menu

Shutter delay causes the SQC-122c to delay opening the shutter until the process has stabilized at the desired deposition rate. The time value is the maximum amount of time to wait, before an error is sensed. Capture is the % rate deviation that must be achieved to open the shutter and go to the Deposit phase. Capture will override the shutter delay if accuracy is reached. Set Shutter Delay and Capture to zero to disable this feature.

If the SQC-122c is unable to maintain the desired deposition rate (for example, out of material or a bad sensor), one of three actions is possible. Keep trying (Ignore), set power to zero to halt deposition (Stop), or maintain constant power (Hold) and extrapolate thickness from the last good rate reading. Until your process is known and stable, it is best to leave the Control Error setting on Ignore.

Rate sampling can extend sensor life in high rate processes. Select Cont (continuous) to disable rate sampling. A Time selection closes the shutter for a fixed time, then opens the shutter for a fixed time to sample the rate. Acc Based (accuracy based) sampling closes the shutter for a fixed time, then opens the shutter until the desired rate is achieved. Rate Sampling assumes a very stable process!

Each film parameter has been set. Press Exit to Main to return to the Main Screen.

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