Chapter 3 | Menus |
In the I/O Setup Menu, any number of “events” can be mapped to the eight digital inputs and eight relay outputs. Options are set by selecting a relay or input and then turning the control knob to select the desired setting. The following explains each event:
Relays | Explanation (closes when) |
Source 1 Shutter | Deposit phase for films set to Output 1. |
Source 2 Shutter | Deposit phase for films set to Output 2. |
Sensor 1 Shutter | Shutter Delay and Deposit phases of films set to Sensor 1. |
Sensor 2 Shutter | Shutter Delay and Deposit phases of films set to Sensor 2. |
All Crystal Fail | All sensors assigned to this film have failed. |
Sensor 1 Fail | Sensor 1 is assigned to this film, and has failed. |
Sensor 2 Fail | Sensor 2 is assigned to this film, and has failed. |
PreCond Phase | Process is in Ramp1, Soak1, Ramp2, or Soak2 phase. |
Deposit Phase | Process is in Deposit phase. |
SoakHold Phase | Process is in Soak/Hold phase. |
Process Active | Process is running (not stopped). |
Stopped | Process is stopped (not running). |
Manual Mode | Process is in Manual mode (not under PID control). |
Max Power | Active output is at maximum power (out of material?). |
Time Setpoint | The process has been in Deposit phase the indicated time. |
Thickness Setpoint | Thickness setpoint reached. Resets on start of next Layer. |
Final Thickness | Final thickness reached. Resets on start of next Layer. |
Pocket | Source pocket # (Single Mode) or BCD bit # (Multi mode) |
Dual Crystal Shutter | Primary sensor in a dual sensor has failed. |
None | This relay is not assigned to any event. |
Inputs | Explanation (high input causes) |
Abort Process | Abort the process. Can only restart at Layer 1. |
Start Process | Start the process at Layer 1. |
Stop Layer | Stop the active layer. |
Restart Layer | Start the active layer. |
Start Next Layer | Start the next layer. |
Soak Hold | Delay the start of deposition. |
Force Final Thickness | End deposition. |
Zero Thickness | Reset thickness reading to zero. |
Zero Time | Reset time setpoint counter to zero. |
Start Process | Start the selected process. |
Pocket Ready | The source indexer is on the desired pocket. |
None | This input is not assigned. |