1.0Introduction
The SQC-122c is a multi-channel quartz crystal monitor and deposition controller. It measures up to six 1MHz to 6 MHz quartz crystal sensors, and controls two evaporation sources. Twenty-five processes, consisting of 250 layers and 25 materials, can be stored for easy retrieval. Eight process control relays, and eight digital inputs are easily configured to support a broad range of external functions, including source pocket rotation.
The SQC-122c can also be controlled via the standard RS-232 interface and Windows control program. An optional handheld remote power control is also available.
Note: The SQC-122 (color display) replaces our original (monochrome) SQC-122. Operation and programming of the two models are identical.
This chapter will aid you in the initial setup and operation of your system. Please review the entire manual for detailed operational, programming, and safety information.
1.1Thin Film Process Overview
The SQC-122c stores the recipes, and provides the operating functions, required to control thin film deposition processes. A typical thin film deposition cycle is shown below.
The cycle can be broken into three distinct phases: pre-conditioning (ramp/soak), deposition, and post-conditioning (feed/idle). During pre-conditioning, power is supplied in steps to prepare the evaporation source for deposition. Once the material is near the desired deposition rate, material deposition begins. During deposition, the PID loop adjusts the evaporation source power as required to maintain the desired deposition rate. When the desired thickness is reached, the evaporation source is set to idle power. At this point the process may be complete, or deposition of another film layer may begin.
