Sigma SQC-122c manual Chapter Operation

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Chapter 2

Operation

Once the sensor parameters are set, test your sensor setup to assure reliable readings at the SQC-122c. A typical single sensor setup is shown below:

On the SQC-122c, press Next Menu until the Sensor Info option is shown, then press Sensor Info.

Any connected sensor (whether programmed On or Off) should display its frequency and % remaining life, as defined by Min and Max Frequency setup. For a new sensor, the value should be near 100%. If the % Life is 0.00% or jumps around, check your cabling and the installation of the sensor in its holder.

Sigma supplies a small 5.5MHz “test crystal adapter” with each oscillator. If the % Life reading is not correct, remove the 6” BNC that is connected to your feedthrough at the oscillator. Connect the test crystal and adapter to the oscillator connector labeled feedthrough. For a typical setup of 6MHz Max Frequency and 5MHz Min Frequency, the % life display should be near 50%.

More information on locating system and sensor problems is described in the Troubleshooting section, later in this chapter.

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Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Symbols Safety InformationReturn Policy Warranty InformationLimitation of Warranty Chapter Options Table of Contents Chapter Quick StartChapter Operation Chapter MenusAppendix Thin Film Process Overview Chapter Quick Start IntroductionChapter Quick Start Front Panel Chapter Quick Start Rear Panel Power Input FuseChapter Quick Start System Connections Chapter Quick Start Installation Select Chapter Quick Start Process SetupPower Quick SetupExit to Main Edit Mode LayerChapter Quick Start Chapter Quick Start Depositing a Film This page left blank for your notes Defining a Film Chapter Operation IntroductionDefinitions POWER% POWER% Deposition Controls Menu Layer Edit Menu Chapter Operation Defining a ProcessChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation No Readings, or Erratic Readings from Sensors Chapter Operation TroubleshootingPoor Rate Stability Incorrect Rate or Thickness MeasurementThis page left blank for your notes Chapter Menus Introduction Chapter Menus Main Menu Default, power-up Main Screen display is shown belowFilm SetupNext Menu QuickChapter Menus Next Menu Screens Next Layer Chapter Menus Quick Setup MenuExit to Main Edit Prev LayerChapter Menus Main Screen Prev Menu Select Edit Delete Control Knob Chapter Menus Process MenusInsert Layer Control Knob Main Screen Prev Menu Edit Cut PasteExit to Main Prev Menu Edit Control Knob POWER%Chapter Menus Main Screen Prev Menu Edit Delete Control Knob Chapter Menus Film MenusExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Mapping Menu Chapter Menus I/O SetupInputs Explanation high input causes Relays Explanation closes whenThis page left blank for your notes Option Card Full Rack Extender InstallationChapter Options Introduction Appendix Material Parameters Source Appendix SpecificationsGeneral Specifications MeasurementDisplay Appendix O Connections Connector Wiring Relay PinsInput Pins Appendix Appendix Handheld Remote Controller Uses the following standards Complies with the Essential Health and Safety RequirementsAppendix EC Declaration of Conformity Declares that the product