Sigma SQC-122c manual Chapter Quick Start Installation

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Chapter 1

Quick Start

1.5Installation

WARNING: Care should be exercised to route SQC-122c cables as far as practical from other cables that carry high voltages or generate noise. This includes other line voltage cables, wires to heaters that are SCR-controlled, and cables to source power supplies that may conduct high transient currents during arc down conditions.

Rack Installation

Power Connection

Sensor Input Connections

Source Output Connections

Digital I/O Connections

Computer Connection

The SQC-122c occupies a 5.25” high, half-rack space. An optional installation kit is available to adapt to a full rack (see Chapter 4). Install the unit in a 19” rack with the supplied hardware.

The SQC-122c automatically detects mains voltages of 100- 120 and 200-240VAC, 50/60Hz.

WARNING: Verify that the power cable provided is connected to a properly grounded mains receptacle.

Connect the BNC cables and oscillators from your vacuum chamber feedthrough to the desired SQC-122c sensor inputs.

Connect the BNC cables from the SQC-122c output connectors to your evaporation supply control input.

Refer to Appendix C for details on wiring digital I/O to the SQC- 122c Relay I/O connectors.

If you would like to use the Windows software to collect data or program the SQC-122c, attach a 9 pin straight-thru cable from the RS-232 connector to your computer’s serial port.

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Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Information Safety SymbolsLimitation of Warranty Warranty InformationReturn Policy Chapter Menus Table of Contents Chapter Quick StartChapter Operation Chapter OptionsAppendix Chapter Quick Start Introduction Thin Film Process OverviewChapter Quick Start Front Panel Power Input Fuse Chapter Quick Start Rear PanelChapter Quick Start System Connections Chapter Quick Start Installation Quick Setup Chapter Quick Start Process SetupPower SelectChapter Quick Start Edit Mode LayerExit to Main Chapter Quick Start Depositing a Film This page left blank for your notes Definitions Chapter Operation IntroductionDefining a Film POWER% POWER% Deposition Controls Menu Chapter Operation Defining a Process Layer Edit MenuChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation Chapter Operation Troubleshooting No Readings, or Erratic Readings from SensorsIncorrect Rate or Thickness Measurement Poor Rate StabilityThis page left blank for your notes Chapter Menus Introduction Default, power-up Main Screen display is shown below Chapter Menus Main MenuMenu Quick SetupNext FilmChapter Menus Next Menu Screens Prev Layer Chapter Menus Quick Setup MenuExit to Main Edit Next LayerChapter Menus Chapter Menus Process Menus Main Screen Prev Menu Select Edit Delete Control KnobMain Screen Prev Menu Edit Cut Paste Insert Layer Control KnobPOWER% Exit to Main Prev Menu Edit Control KnobChapter Menus Chapter Menus Film Menus Main Screen Prev Menu Edit Delete Control KnobExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Chapter Menus I/O Setup Mapping MenuRelays Explanation closes when Inputs Explanation high input causesThis page left blank for your notes Chapter Options Introduction Full Rack Extender InstallationOption Card Appendix Material Parameters Measurement Appendix SpecificationsGeneral Specifications SourceDisplay Input Pins Connector Wiring Relay PinsAppendix O Connections Appendix Appendix Handheld Remote Controller Declares that the product Complies with the Essential Health and Safety RequirementsAppendix EC Declaration of Conformity Uses the following standards