Sigma SQC-122c manual Chapter Quick Start System Connections

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Chapter 1

Quick Start

1.4System Connections

S e n s o r

I n - V a c

C a b l e

F e e d t h r o u g h

6 " B N C C a b l e

Oscillator

S o u r c e Shutter

B N C

Evaporation Supply

C a b l e s

 

 

O u t p u t C o n t r o l I n p u t

 

G r o u n d W i r e

This section identifies typical system components and their connection:

System Components

Sensor

In-Vac Cable

Feedthrough

6” BNC Cable

Oscillator

Sensor Input BNC Cable

Control Output BNC Cable

Ground Wire

Holds the quartz crystal used to measure rate and thickness. Crystals must be replaced occasionally.

A coaxial cable that connects the sensor to the feedthrough.

Provides isolation between vacuum and atmosphere for electrical and cooling lines.

Provides a flexible connection from the feedthrough to the oscillator. Keep this cable as short as possible.

Contains the electronics to operate the quartz crystal. Total cable length to the crystal should be under 40”.

Connects the oscillator to the SQC-122c input. Lengths up to 100’ are acceptable.

Connects the SQC-122c output to the evaporation source’s control voltage input. Keep the length below 10’.

A wire, typically braided, that connects the vacuum system to the SQC-122c ground terminal.

1-4

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Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Symbols Safety InformationWarranty Information Limitation of WarrantyReturn Policy Chapter Operation Table of Contents Chapter Quick StartChapter Menus Chapter OptionsAppendix Thin Film Process Overview Chapter Quick Start IntroductionChapter Quick Start Front Panel Chapter Quick Start Rear Panel Power Input FuseChapter Quick Start System Connections Chapter Quick Start Installation Power Chapter Quick Start Process SetupQuick Setup SelectEdit Mode Layer Chapter Quick StartExit to Main Chapter Quick Start Depositing a Film This page left blank for your notes Chapter Operation Introduction DefinitionsDefining a Film POWER% POWER% Deposition Controls Menu Layer Edit Menu Chapter Operation Defining a ProcessChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation No Readings, or Erratic Readings from Sensors Chapter Operation TroubleshootingPoor Rate Stability Incorrect Rate or Thickness MeasurementThis page left blank for your notes Chapter Menus Introduction Chapter Menus Main Menu Default, power-up Main Screen display is shown belowNext SetupMenu Quick FilmChapter Menus Next Menu Screens Exit to Main Edit Chapter Menus Quick Setup MenuPrev Layer Next LayerChapter Menus Main Screen Prev Menu Select Edit Delete Control Knob Chapter Menus Process MenusInsert Layer Control Knob Main Screen Prev Menu Edit Cut PasteExit to Main Prev Menu Edit Control Knob POWER%Chapter Menus Main Screen Prev Menu Edit Delete Control Knob Chapter Menus Film MenusExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Mapping Menu Chapter Menus I/O SetupInputs Explanation high input causes Relays Explanation closes whenThis page left blank for your notes Full Rack Extender Installation Chapter Options IntroductionOption Card Appendix Material Parameters General Specifications Appendix SpecificationsMeasurement SourceDisplay Connector Wiring Relay Pins Input PinsAppendix O Connections Appendix Appendix Handheld Remote Controller Appendix EC Declaration of Conformity Complies with the Essential Health and Safety RequirementsDeclares that the product Uses the following standards