Sigma SQC-122c Chapter Menus Main Menu, Default, power-up Main Screen display is shown below

Page 35

Chapter 3

Menus

3.1Main Menu

The default, power-up Main Screen display is shown below.

Next Menu

Quick Setup

THICKNESS(kA)

RATE(A/s)

P O W E R (% )

0.000

0.0

0.0

 

100.0

 

 

 

 

 

 

 

 

Process

Menu

Film

Menu

System Params

Start

50.0

0.0

0.0

12.5

25.0

37.5

50.0

 

 

Power (% vs. Time)

 

 

 

 

 

 

 

 

 

PHASE: Stopped

 

 

Process : My Process 1

Run Time : 0:00:00

 

Layer: 1 of 25

 

Final Thick : 0.1011

 

Film : Aluminum

 

Layer Rate : 11.1

 

Main Screen

The measured Thickness, Rate, and output Power values are always displayed along the top of the screen.

The graph displays either Rate, Rate Deviation, or output Power. The next section of the manual describes graph selection.

The status bar below the graph displays the current deposition phase. In Manual mode, Manual Power is displayed in the status bar. In Auto mode, the status bar will automatically sequence through the pre-condition, deposit, and feed/idle phases for each layer, as defined by the Process setup.

Below the status bar, important settings for the current process are shown. The next section explains other parameters that can be displayed in this screen area.

3-2

Image 35
Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Symbols Safety InformationReturn Policy Warranty InformationLimitation of Warranty Chapter Options Table of Contents Chapter Quick StartChapter Operation Chapter MenusAppendix Thin Film Process Overview Chapter Quick Start IntroductionChapter Quick Start Front Panel Chapter Quick Start Rear Panel Power Input FuseChapter Quick Start System Connections Chapter Quick Start Installation Select Chapter Quick Start Process SetupPower Quick SetupExit to Main Edit Mode LayerChapter Quick Start Chapter Quick Start Depositing a Film This page left blank for your notes Defining a Film Chapter Operation IntroductionDefinitions POWER% POWER% Deposition Controls Menu Layer Edit Menu Chapter Operation Defining a ProcessChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation No Readings, or Erratic Readings from Sensors Chapter Operation Troubleshooting Poor Rate Stability Incorrect Rate or Thickness MeasurementThis page left blank for your notes Chapter Menus Introduction Chapter Menus Main Menu Default, power-up Main Screen display is shown belowFilm SetupNext Menu QuickChapter Menus Next Menu Screens Next Layer Chapter Menus Quick Setup MenuExit to Main Edit Prev LayerChapter Menus Main Screen Prev Menu Select Edit Delete Control Knob Chapter Menus Process MenusInsert Layer Control Knob Main Screen Prev Menu Edit Cut PasteExit to Main Prev Menu Edit Control Knob POWER%Chapter Menus Main Screen Prev Menu Edit Delete Control Knob Chapter Menus Film MenusExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Mapping Menu Chapter Menus I/O SetupInputs Explanation high input causes Relays Explanation closes whenThis page left blank for your notes Option Card Full Rack Extender InstallationChapter Options Introduction Appendix Material Parameters Source Appendix SpecificationsGeneral Specifications MeasurementDisplay Appendix O Connections Connector Wiring Relay PinsInput Pins Appendix Appendix Handheld Remote Controller Uses the following standards Complies with the Essential Health and Safety RequirementsAppendix EC Declaration of Conformity Declares that the product