Sigma SQC-122c manual Chapter Menus Next Menu Screens

Page 37

Chapter 3

Menus

3.2Next Menu Screens

The Next Menu SoftKey provides access to two sub-menus of the Main Menu that control display and operating mode preferences.

 

 

THICKNESS(kA)

RATE(A/s)

 

POWER(%)

 

 

 

THICKNESS(kA)

RATE(A/s)

 

POWER(%)

 

Next

 

 

 

Next

 

 

 

 

0.000

 

 

0.0

0.0

 

 

 

 

 

0.000

 

 

0.0

0.0

 

 

 

Menu

 

 

 

 

 

 

 

Menu

 

 

 

 

 

 

 

100.0

 

 

 

 

 

 

 

 

 

 

 

 

100.0

 

 

 

 

 

 

 

 

 

 

Zero

 

 

 

 

 

 

 

 

 

 

 

 

 

Next

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Graph

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

50.0

 

 

 

 

 

 

 

 

 

 

 

 

 

50.0

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Auto /

 

 

 

 

 

 

 

 

 

 

 

 

Switch

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Manual

 

 

 

 

 

 

 

 

 

 

 

 

 

Displays

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Sensor

 

 

 

 

 

 

 

 

 

 

 

 

 

 

0.0

 

 

 

 

 

 

 

 

 

 

 

Info

 

0.0

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

0.0

12.5

25.0

37.5

50.0

 

 

 

 

 

0.0

12.5

25.0

37.5

50.0

 

 

 

 

 

 

 

Power (% vs. Time)

 

 

 

 

 

 

 

 

 

 

 

 

Power (% vs. Time)

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

PHASE: Stopped

 

 

 

 

 

 

 

 

 

 

 

 

PHASE: Stopped

 

 

 

 

 

 

 

Run #: 1

 

 

 

Source: 1

 

 

 

 

 

 

Run #: 1

 

 

 

Source: 1

 

 

 

 

 

Start

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

5-16-00

 

 

 

Max Pow:: 100.00 %

 

 

 

 

Start

 

5-16-00

 

 

 

Max Pow:: 100.00 %

 

 

 

 

 

8:22:39

 

 

 

Slew: 100.00 %

 

 

 

 

 

 

8:22:39

 

 

 

Slew: 100.00 %

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Zero

Auto /

Manual

Next

Graph

Switch

Displays

Sensor Info

Next Menu Screens

Zeros the thickness reading. Useful for resetting or extending the current deposition layer.

Toggles between Auto and Manual power control. When Auto/Manual is shown, output power is set by the SQC-122c to achieve the programmed deposition rate. When Manual/Auto is shown, the control knob sets the output power.

Cycles through options for the main display. Choose between Rate, Rate Deviation, and Power graphs.

Toggles between data display options at the bottom of the SQC-122c screen. Note the differences between the screens above, and the Main Menu screen in the previous section.

Replaces the graph with the sensor information screen:

Next

 

 

THICKNESS(kA)

RATE(A/s)

POWER( %)

 

0.000

 

0.0

0.0

 

Menu

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Sensor #

Enable

Frequency

 

Life

 

 

 

 

 

 

 

 

 

 

 

 

1

ON

5.543210 MHz

 

54.32 %

 

 

 

 

2

ON

5.654321 MHz

 

65.43 %

 

 

 

 

 

 

 

 

 

 

3-4

Image 37
Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Symbols Safety InformationLimitation of Warranty Warranty InformationReturn Policy Chapter Operation Table of Contents Chapter Quick StartChapter Menus Chapter OptionsAppendix Thin Film Process Overview Chapter Quick Start IntroductionChapter Quick Start Front Panel Chapter Quick Start Rear Panel Power Input FuseChapter Quick Start System Connections Chapter Quick Start Installation Power Chapter Quick Start Process SetupQuick Setup SelectChapter Quick Start Edit Mode LayerExit to Main Chapter Quick Start Depositing a Film This page left blank for your notes Definitions Chapter Operation IntroductionDefining a Film POWER% POWER% Deposition Controls Menu Layer Edit Menu Chapter Operation Defining a ProcessChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation No Readings, or Erratic Readings from Sensors Chapter Operation TroubleshootingPoor Rate Stability Incorrect Rate or Thickness MeasurementThis page left blank for your notes Chapter Menus Introduction Chapter Menus Main Menu Default, power-up Main Screen display is shown belowNext SetupMenu Quick FilmChapter Menus Next Menu Screens Exit to Main Edit Chapter Menus Quick Setup MenuPrev Layer Next LayerChapter Menus Main Screen Prev Menu Select Edit Delete Control Knob Chapter Menus Process MenusInsert Layer Control Knob Main Screen Prev Menu Edit Cut PasteExit to Main Prev Menu Edit Control Knob POWER%Chapter Menus Main Screen Prev Menu Edit Delete Control Knob Chapter Menus Film MenusExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Mapping Menu Chapter Menus I/O SetupInputs Explanation high input causes Relays Explanation closes whenThis page left blank for your notes Chapter Options Introduction Full Rack Extender InstallationOption Card Appendix Material Parameters General Specifications Appendix SpecificationsMeasurement SourceDisplay Input Pins Connector Wiring Relay PinsAppendix O Connections Appendix Appendix Handheld Remote Controller Appendix EC Declaration of Conformity Complies with the Essential Health and Safety RequirementsDeclares that the product Uses the following standards