Sigma SQC-122c manual Exit to Main Prev Menu Edit THICKNESSkA RATEA/s

Page 46

Chapter 3

Menus

The Film Conds SoftKey displays these additional film conditioning settings: (Refer to section 2.2 for definitions).

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Edit

THICKNESS(kA)

 

RATE(A/s)

POWER(%)

0.000

0.0

0.0

 

My Process 1 Editing: Aluminum

 

 

 

 

 

 

 

Parameter

 

Value

Units

 

 

 

 

 

 

 

 

 

 

 

Ramp1 Power

50

%

 

 

 

 

 

 

 

Ramp1 Time

0.7

h:mm:ss

 

Soak1 Time

0.0

h:mm:ss

 

Ramp2 Power

 

On

%

 

Ramp2 Time

 

On

h:mm:ss

 

Soak2 Time

 

Out1

h:mm:ss

 

Feed Power

75.0

%

 

Ramp Time

10.0

h:mm:ss

 

Feed Time

0:00:00

h:mm:ss

 

Idle Power

2.90

%

 

Ramp Time

0.950

h:mm:ss

 

 

 

 

 

 

 

Film Conditioning Menu

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Edit

Returns to the Main Menu.

Returns to the Film Edit Menu.

Selects the highlighted parameter for edit. SoftKey functions change to:

Next: Store parameter and move to next for editing.

Cancel: Stop editing and undo changes to selected parameter.

Enter: Stop editing and save values for selected parameter.

Control Knob: Turn to adjust value. Push to store value and move to next parameter.

Control Knob Scrolls through the list of film conditioning parameters.

3-13

Image 46
Contents SQC-122c Thin Film Deposition Controller User’s Guide Safety Information Safety SymbolsLimitation of Warranty Warranty InformationReturn Policy Chapter Menus Table of Contents Chapter Quick StartChapter Operation Chapter OptionsAppendix Chapter Quick Start Introduction Thin Film Process OverviewChapter Quick Start Front Panel Power Input Fuse Chapter Quick Start Rear PanelChapter Quick Start System Connections Chapter Quick Start Installation Quick Setup Chapter Quick Start Process SetupPower SelectChapter Quick Start Edit Mode LayerExit to Main Chapter Quick Start Depositing a Film This page left blank for your notes Definitions Chapter Operation IntroductionDefining a Film POWER% POWER% Deposition Controls Menu Chapter Operation Defining a Process Layer Edit MenuChapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation Chapter Operation Troubleshooting No Readings, or Erratic Readings from SensorsIncorrect Rate or Thickness Measurement Poor Rate StabilityThis page left blank for your notes Chapter Menus Introduction Default, power-up Main Screen display is shown below Chapter Menus Main MenuMenu Quick SetupNext FilmChapter Menus Next Menu Screens Prev Layer Chapter Menus Quick Setup MenuExit to Main Edit Next LayerChapter Menus Chapter Menus Process Menus Main Screen Prev Menu Select Edit Delete Control KnobMain Screen Prev Menu Edit Cut Paste Insert Layer Control KnobPOWER% Exit to Main Prev Menu Edit Control KnobChapter Menus Chapter Menus Film Menus Main Screen Prev Menu Edit Delete Control KnobExit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Chapter Menus I/O Setup Mapping MenuRelays Explanation closes when Inputs Explanation high input causesThis page left blank for your notes Chapter Options Introduction Full Rack Extender InstallationOption Card Appendix Material Parameters Measurement Appendix SpecificationsGeneral Specifications SourceDisplay Input Pins Connector Wiring Relay PinsAppendix O Connections Appendix Appendix Handheld Remote Controller Declares that the product Complies with the Essential Health and Safety RequirementsAppendix EC Declaration of Conformity Uses the following standards