Sigma SQC-122c manual Power%

Chapter 2 Operation

The most commonly modified parameters are shown on the first film parameters screen. Additional parameters can be accessed by pressing Film Conds (film conditioning) or Deposit Controls.

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Film

Conds.

Deposit Controls

THICKNESS(kA)			RATE(A/s)	POWER(%)
0.000		0.0		0.0
My Process 1	Editing: Aluminum
Parameter			Value	Units
P Term		50		None
I Term		0.7		Sec.
D Term		0.0		Sec.
Sensor 1			On	On/Off
Sensor 2			On	On/Off
Film Tooling		100		%
Output			Out1	Out1/Out2
Pocket		1
Max Power		76.0
Slew Rate		10.0		%
Crystal Quality			Disabled

Film Edit Menu

Scroll to the end of the list (Z-Factor), then scroll back up to Material. Press Edit to scroll through the list of available materials. Notice that the Density and Z-Factor are updated automatically as a new material appears.

Select the desired material and press Enter. You could change the Density and Z- Factor for the selected material now, but it is unlikely those values are wrong. To add a material name that is not listed, you must use the SQC-122c setup software.

Once the material is selected, set up the source parameters. Scroll to Output and select the SQC-122c rear panel output that is connected to the source evaporation supply. If a source pocket indexer is being used, assign it also.

Now assign the Max Power and Slew Rate appropriate for this material and your power supply. For now, set both to 100%. Set them to lower values later if you find that small power changes cause excessively large changes in deposition rate.

The SQC-122c can use multiple sensors to measure a film’s deposition rate and thickness. If multiple sensors are selected, an average of the sensors is used. Set each sensor that will be used to measure this film to ON. Alternately, you might want to use a dual shuttered sensor in case of crystal failures. See the Film Menu section of Chapter 3 for instructions on setting up a primary/secondary dual sensor.

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