Agilent Technologies B2201A manual To obtain compensation coefficients

Programming

Capacitance Compensation

To obtain compensation coefficients

Obtain the compensation coefficients as shown below.

1.Select the measurement frequency (Fmeas) used for the capacitance measurement of a device under test (DUT), and set it to the Agilent 4284A. The coefficients must be measured at the same frequency.

2.Perform the Agilent 4284A open calibration at the measurement terminal. Optionally, perform short calibration if you want.

3.See Table 4-11 and Figure 4-7, and set the Agilent 4284A.

4.Connect the path/cable corresponding to C3H shown in Figure 4-6 to the Agilent 4284A. Then measure and record the R, L, and C values.

5.Connect the path/cable corresponding to C3L to the Agilent 4284A. Then measure and record the R, L, and C values.

6.If you use the connector plate, perform the following procedure.

a.Connect the path/cable corresponding to C2H to the Agilent 4284A. Then measure and record the R, L, and C values.

b.Connect the path/cable corresponding to C2L to the Agilent 4284A. Then measure and record the R, L, and C values.

Table 4-11	R, L, C Measurement Conditions
		Parameter	Frequency	Function	Terminals
		R	1 kHz to 1 MHz a	−	A and B
		L		SERIES	see note b
		C		PARALLEL	A and C

a.Select 1 point. Do not change while measurements of all coefficients.

b.For triaxial cable, connect B to F directly, and measure L between A and E. For coaxial cable, connect B to D directly, and measure L between A and C. Ignore E and F.

Figure 4-7	Measurement Terminals of C2H/C2L/C3H/C3L Path
	GUARD (C) GROUND (E)	GROUND (F) GUARD (D)
		Insulator
	FORCE or SENSE (A)	Triaxial Cable
		FORCE or SENSE (B)

4-26 Agilent B2200 User’s Guide, Edition 2