Seiko Instruments MT-17E-003-D instruction manual Table Of Contents

STP-H600/H1000 Series Instruction Manual

TABLE OF CONTENTS

SAFETY PRECAUTION
INTRODUCTION
LIMITED WARRANTY
1 Precautions for Safe Operation of the STP Pump			1-1
1.1	Usable Gases		1-1
1.2	Maintenance Precautions		1-1
1.3	Inspection Precautions		1-2
1.4	Labels	........................................................................................................................	1-2
2 Unpacking			2-1
2.1	Unpacking the STP Pump		2-1
2.2	Unpacking the STP Control Unit		2-2
3 Installation of the STP pump			3-1
3.1	Name and Function of Each Part		3-1
3.2	Precautions Before Installation		3-3
	3.2.1	Operating Environment	3-3
	3.2.2	Installation Area	3-4
	3.2.3	Bench	3-4
3.3	How to Install the STP Pump		3-5
	3.3.1	Cleaning the Seal	3-6
	3.3.2 STP Pump Installation Positions		3-7
	3.3.3 How to Secure the STP Pump		3-8
	3.3.4	Vacuum Piping	3-12
	3.3.5 Connecting the Emergency Vent. Valve		3-14
	3.3.6 Connecting the Purge Port		3-14
	3.3.7 Connecting the Ground Cable		3-15
4 Installation of the STP Control Unit			4-1
4.1	Name and Function of Each Part		4-1
	4.1.1	Front Panel	4-1
	4.1.2	Rear Panel	4-4
	4.1.3 Inside of the STP Control Unit		4-6
4.2	Precautions Before Installation		4-8
	4.2.1	Operating Environment	4-8
	4.2.2	Installation Area	4-9
4.3	Attaching the STP Control Unit Front Panel to a Rack		4-10
4.4	Cable Connection		4-11
	4.4.1 Name and Dimensions of Each Cable		4-11
	4.4.2 How to Connect the Cables		4-13
5 How to Start/Stop the STP Pump			5-1
5.1	Before Starting		5-1
5.2	Starting/Stopping Time		5-1
5.3	Start Procedures		5-2
5.4	Stop Procedures		5-2
5.5	Manual Operation		5-3
	5.5.1	Powering ON	5-3
	5.5.2 Starting the STP Pump		5-3
	5.5.3 Stopping the STP Pump		5-3

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