Seiko Instruments MT-17E-003-D instruction manual Introduction, Applied Standards

Models: MT-17E-003-D

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INTRODUCTION

STP-H600/H1000 Series Instruction Manual

INTRODUCTION

Thank you very much for purchasing Seiko Instruments’s turbomolecular pump. The turbomolecular pump is designed to be installed in the vacuum equipment in to exhaust gases from it.

This manual covers all items necessary to ensure safe installation, operation and maintenance of the following series of the STP-H600/H1000 turbomolecular pump:

Model Name

Specification

￿￿ STP-H600

High-throughput type

￿￿STP-H1000 High-throughput type

￿￿STP-H600C High-throughput type, chemical specific *1

￿￿STP-H1000C High-throughput type, chemical specific

For the specifications of other models of the STP-H600/H1000 pump series, contact Seiko Instruments.

In this manual, the above STP pump series is collectively referred to as the “STP pump.”

APPLIED STANDARDS

The STP pump conforms to the following directives and standards:

Applied Directives

￿￿EC Machinery Directive

￿￿EC Electromagnetic Compatibility Directive

￿￿EC Low Voltage Directive

Applied Standards

￿￿EN292-1

￿￿EN292-2

￿￿EN60204-1

￿￿EN55011 (class A)

￿￿EN50082-2

Applied Standards (Only a some model)*2

￿￿UL3101-1,1993 (Electrical Equipment for Laboratory Use; Part 1 : General Requirements)

*1 Chemical specific: STP pump with anti-corrosive treatment (responding to chlorine, fluorine or other system gases) *2 Contact Seiko Instruments about recognized model.

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Seiko Instruments MT-17E-003-D Introduction, Applied Standards, Applied Directives EC Machinery Directive