
INTRODUCTION
Thank you very much for purchasing Seiko Instruments’s turbomolecular pump. The turbomolecular pump is designed to be installed in the vacuum equipment in to exhaust gases from it.
This manual covers all items necessary to ensure safe installation, operation and maintenance of the following series of the
Model Name | Specification |
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For the specifications of other models of the
In this manual, the above STP pump series is collectively referred to as the “STP pump.”
APPLIED STANDARDS
The STP pump conforms to the following directives and standards:
◇Applied Directives
EC Machinery Directive
EC Electromagnetic Compatibility Directive
EC Low Voltage Directive
◇Applied Standards
EN292-1
EN55011 (class A)
EN50082-2
◇Applied Standards (Only a some model)*2
*1 Chemical specific: STP pump with
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