Seiko Instruments MT-17E-003-D instruction manual Abnormality

Models: MT-17E-003-D

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STP-H600/H1000 Series Instruction Manual

Table 6.3 Safety Functions

[E.V. used herein is the abbreviation for Emergency Vent.]

Abnormality

Operation state of safety

Lamp indication

REMOTE

State of the STP pump

Probable causes of an

/Error

functions

output signal

abnormality/error

Power failure

Failure time: 2 seconds or

"BATTERY

"ALARM"

Levitation continues by battery.

Power failure.

 

more (for details, refer to

OPERATION"

"E.V. valve

The STP pump stops.

Power cable breakage.

 

Section 6.1.1, "Power

"EMERGENCY

OPEN

The E.V. valve functions at

Power cable disconnection

 

Failure").

OPERATION"

signal"

approx. 7000 rpm.

 

 

 

 

 

The rotor lands on the touch down

 

 

 

 

 

bearing at approx. 2000 rpm.

 

Abnormal

Rotor descends onto the

"EMERGENCY

"ALARM"

The E.V. valve is opened.

STP connection cable breakage.

magnetic

touch down bearing.

OPERATION"

"E.V. valve

The STP pump stops.

STP connection cable

bearing

 

 

OPEN

 

disconnection.

 

 

 

signal"

 

Abnormal control circuit.

Excessive

Rotor vibration:

"EMERGENCY

"ALARM"

The E.V. valve is opened.

External vibration, and impact.

vibration

100 ￿m p-p or more.

OPERATION"

"E.V. valve

The STP pump stops.

Intrusion of atmospheric air.

 

 

 

OPEN

 

Intrusion of foreign materials.

 

 

 

signal"

 

 

Overload of

Current of more than 40A

"FAILURE"

"ALARM"

The inverter stops.

Leakage from the vacuum

inverter

flows into the inverter

 

 

The STP pump continues to rotate

equipment or piping.

 

momentarily or current of

 

 

by inertia.

Insufficient pressure at inlet

 

more than 11.5A flows into

 

 

 

and outlet port sides.

 

the inverter continuously

 

 

 

Failure of starting of the

 

for 15 minutes.

 

 

 

auxiliary pump.

 

 

 

 

 

 

6-8

Page 67
Image 67
Seiko Instruments MT-17E-003-D instruction manual Abnormality