Seiko Instruments MT-17E-003-D Size of Flange, Number of Claw Clamps, ISO 160 or less, or more

Models: MT-17E-003-D

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Size of Flange

STP-H600/H1000 Series Instruction Manual

2)When securing the inlet port flange with claw clamps Refer to Table 3.2 for rotational torque.

When securing the inlet port flange with only the claw clamp, the vacuum equipment cannot withstand the maximum rotational torque generated by the worst-case failure. To make the vacuum equipment withstand abnormal torque, secure the base with all 8 screw-holes for legs or all 8 attached legs.

Follow “CAUTION” on page 3-8about legs and bolts for securing the base.

For the claw clamp-type, use the required number of claw clamps as specified in Table 3.3. Position the claw clamps evenly on the circumference.

Table 3.3 Number of Claw Clamps by Size of Flange

Size of Flange

Number of Claw Clamps

ISO 160 or less

 

 

 

 

 

4 or more

ISO 200 to 250

 

 

 

 

 

6 or more

ISO 320 or more

 

 

 

 

 

8 or more

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Vacuum Equipment

Claw Clamps

Secure the base

Figure 3.6 Example of securing the STP pump

(When securing the inlet port flange with claw clamps)

3-10

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Seiko Instruments MT-17E-003-D Size of Flange, Number of Claw Clamps, ISO 160 or less, or more, ISO 200 to