Seiko Instruments MT-17E-003-D instruction manual Gas Suction, Cooling and Baking the STP Pump

STP-H600/H1000 Series Instruction Manual

5.5.4 Starting the STP Pump after Stopping		5-3
5.5.5	Powering OFF	5-4
5.6 Remote Operation		5-5
5.6.1	Powering ON	5-5
5.6.2 Starting/Stopping the STP Pump		5-5
5.6.3 Starting the STP Pump After Stopping		5-5
5.6.4	Powering OFF	5-6

6 Safety Functions When an Abnormality/Error Occurs			6-1
6.1	Safety Functions		6-1
	6.1.1	Power Failure	6-1
	6.1.2 Abnormal State of Magnetic Bearing		6-3
	6.1.3	Excessive Vibration	6-3
	6.1.4	Inverter Overload	6-3
	6.1.5 Overheating Inside the STP pump		6-3
	6.1.6 Overheating Inside the STP Control Unit		6-3
	6.1.7	Overspeed	6-3
	6.1.8	Abnormal Battery Voltage	6-4
	6.1.9	Failure of Brake	6-4
6.2	Restarting after Any Safety Function Operates		6-5
6.3	Operation of the Emergency Vent. Valve		6-7

7 Gas Suction, Cooling and Baking the STP Pump			7-1
7.1	Gas Suction		7-1
	7.1.1 How to Introduce a Purge Gas		7-1
7.2	Cooling the STP Pump		7-2
	7.2.1	Water Cooling Method	7-2
	7.2.2	Air Cooling Method	7-3
7.3	Baking the STP Pump		7-4
	7.3.1 Attaching a Baking Heater		7-4
	7.3.2 Interlocking the STP Pump Operation with Baking		7-6

8 Remote Input/Output Signal Terminal Blocks		8-1
8.1	I/O TB2 Terminal Block	8-1
8.2	DC I/O TB3 Terminal Block	8-6
8.3	START STOP TB5 Terminal Block	8-8
8.4	START/STOP TB6 Terminal Block	8-9

9 Internal Battery		9-1
9.1	Life of the Internal Battery	9-1
9.2	Allowable Shelf Life of the Internal Battery	9-1
9.3	How to Charge the Internal Battery	9-2
9.4	BATTERY NG Lamp	9-3
9.5	How to Replace the Internal Battery	9-4
	9.5.1 How to Replace the Battery Case	9-4
	9.5.2 How to Replace the Battery in the Battery Case	9-6
9.6	How to Dispose of the Internal Battery	9-8

10 External Battery		10-1
10.1	Specifications for the External Battery	10-1
10.2	Installation of the External Battery	10-2
10.3	How to Charge the External Battery	10-3
10.4	How to Dispose of the External Battery	10-3

11 Operation Principle of the STP Pump	11-1
10