3.2Precautions Before Installation
3.2.1Operating Environment
CAUTION 
◇Chlorine or fluorine system gases can be used in chemical specific pumps (type C). When you use gases including alkaline metals, but excluding Li, gases including Ga, Hg, Sn, or HBr, contact Seiko Instruments.
◇NEVER use corrosive gases (chlorine, fluorine, or other system gases) in the
Install the STP pump in a place meeting the following requirements:
Ambient Temperature | 0 to 40 °C |
Ambient Relative Humidity | 30 to 95 % (no dew condensing) |
Environment | A place free of |
| A place free of a heat source |
| (Keep clean of the heat source or attach a thermal |
| shield plate). |
| A place free of a strong magnetic field |
| (Range: up to 15mT (150G) in the axial direction, |
| and up to 3mT (30G) in the radial direction with |
| respect to the rotational axis of the STP pump). |
| A place free of a strong electric field. |
| A place free of exposure to radiation. |
| No discharge of high voltage (more than 500 V) |
| (If more than 500 V is discharged, contact Seiko |
| Instruments). |
STP Pump Installation | Install the STP pump securely so that foreign |
Equipment Conditions | particles will easily fall into the STP pump (Ex.: Si |
| wafers or samples are positioned above the STP |
| pump) (To prevent foreign particles from falling into |
| the STP pump, design a shield plate with large |
| conductance). |
